Exposure machine
A technology of exposure machine and spacing, applied in the field of exposure machine, can solve the problem of high production cost of exposure machine, and achieve the effect of reducing production cost
Inactive Publication Date: 2017-02-15
BOE TECH GRP CO LTD +1
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- Description
- Claims
- Application Information
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Problems solved by technology
[0006] However, the mask plate may be aligned with the display substrate from multiple directions. The current common practice is to install a set of detection systems in the space above the mask plate corresponding to each side of the mask plate, but in this way Will lead to higher production costs of the exposure machine
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[0023] In order to make the purpose, features and advantages of the technical solution proposed by the present invention more obvious and understandable, the embodiments of the technical solution proposed by the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are only some of the embodiments of the proposed technical solution, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0024] For ease of description, in this embodiment, the two opposite sides of the mask are referred to as the first side and the second side, respectively.
[0025] see figure 1 and figure 2 , based on the above structure, the present invention provides an exposure machine, the exposure machine includes two sets of detection s...
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The invention provides an exposure machine and relates to the technical field of exposure. The exposure machine realizes alignment of a mask plate and a display substrate along a plurality of directions and reduces an exposure machine production cost. The exposure machine comprises two detection systems. The plane where the detection systems are arranged is parallel to the plane where the mask plate is arranged and is higher than the plane where the mask plate is arranged. The two detection systems are parallel to and corresponding to the opposite first and second sides of the mask plate. The exposure machine further comprises a driving module, a driving wheel and a driven wheel connected to the driving wheel by a crawler belt. The two detection systems are fixedly installed on the end surface of the driven wheel. The driving wheel is connected to the driving module. The driving module drives the driving wheel to rotate. The driving wheel drives the driven wheel to rotate. The driven wheel drives the two detection systems to rotate by a first angle on the plane where the detection systems are arranged. The first angle is any angle greater than 0. The exposure machine is used for display substrate exposure.
Description
technical field [0001] The invention relates to the field of exposure technology, in particular to an exposure machine. Background technique [0002] The preparation of the display substrate includes an exposure process, which can transfer the pattern on the mask plate to the display substrate, thereby forming the pattern of the display substrate. [0003] With the development of display technology, large-sized display substrates are gradually favored by people, but large-sized masks cannot be used in the exposure process of large-sized display substrates due to reasons such as difficult preparation and high cost. Usually, when exposing a large-sized display substrate, a splicing exposure method is adopted, that is, the large-sized display substrate is divided into several small-sized areas, and then each area is sequentially processed using a smaller-sized mask. Exposure, and finally stitching together to form the graphics of the display substrate. [0004] At present, th...
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Login to View More IPC IPC(8): G03F9/00
CPCG03F7/70475G03F9/7096
Inventor 张力舟高鸿飞吴彬马纪艳高琪王辉王志强
Owner BOE TECH GRP CO LTD