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A phase recovery method and device

A phase recovery and phase information technology, applied in the field of optical detection, can solve the problems of limited application, long time to recover the phase, complex algorithm, etc., to achieve the effect of short processing time and high phase recovery accuracy

Active Publication Date: 2019-03-08
孙小卫 +1
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  • Claims
  • Application Information

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Problems solved by technology

[0004] However, there are two main problems in the current method of recovering the phase of the object to be measured from a single interferogram: one is that the algorithm is relatively complex, which leads to a longer time to recover the phase; the other is that the recovered phase is not accurate
Therefore, the application in dynamic phase measurement is greatly limited

Method used

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  • A phase recovery method and device

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Embodiment 1

[0052] figure 1 A flow chart of a phase recovery method provided by Embodiment 1 of the present invention, as shown in figure 1 As shown, the technical solution provided by this embodiment is specifically as follows:

[0053] S110: Acquiring an interference image formed by the reference beam and the detection beam passing through the object to be measured.

[0054] In this embodiment, the interference image can be obtained by an interference image acquisition module. Wherein, the interference image acquisition module may be a device based on a Mach-Zehnder interference optical path or a Michael interferometer. Wherein, the interference image can reflect the phase information of the object to be measured, and the phase information of the object to be measured can reflect attributes such as the shape of the object to be measured.

[0055] In this embodiment, the light intensity of the obtained interference image can be expressed as: Among them, I(i,j) is the light intensity...

Embodiment 2

[0155] Figure 9a is a structural block diagram of a phase recovery device provided in Embodiment 2 of the present invention, such as Figure 9a As shown, the device includes:

[0156] An interference image acquisition module 910, configured to acquire an interference image formed by the reference beam and the detection beam passing through the object to be measured;

[0157] A normalization processing module 920, configured to perform filtering and normalization processing on the interference image;

[0158] A phase shift transformation module 930, configured to perform phase shift transformation on the normalized interference image based on the phase shift transformation coefficient, to obtain a preset number of phase shift interference images;

[0159] A phase recovery module 940, configured to use a phase recovery algorithm to recover the phase information of the object under test with packages from the phase-shifted interference image;

[0160] The unwrapping processin...

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Abstract

The embodiment of the invention provides a phase recovery method and device, and the method comprises the steps: obtaining an interference image formed by a reference light beam and a detection light beam passing through a to-be-detected object; carrying out the filtering and normalization processing of the interference image; carrying out the phase shift conversion of the interference image based on a phase shift conversion coefficient after normalization, and obtaining a preset number of phase shift interference images; restoring the phase information with the package of the to-be-detected object from the phase shift interference images through employing a phase recovery algorithm; and carrying out the unwrapping of the phase information with the package. According to the embodiment of the invention, the method can restore the phase of the to-be-detected object through a single interference image, is high in phase recovery precision, and is short in processing time.

Description

technical field [0001] Embodiments of the present invention relate to optical detection technology, and in particular to a phase recovery method and device. Background technique [0002] Phase-shift interferometry (PSI) is a high-precision phase measurement technology, which is widely used in surface inspection of optical components, deformation detection, digital holography and other fields. Generally speaking, at least three phase-shifted interferograms are required to recover the phase by the phase-shifting algorithm. [0003] At present, for the phase recovery problem of phase-shifted interferograms, on the one hand, in-depth research is carried out around recovering phases from multiple phase-shifted interferograms. Among them, the phase recovery problem under extreme conditions is difficult. For example, for a set of phase-shifted interferograms , the extreme conditions mainly include the small phase shift between interferograms, the small number of interferograms, an...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02G01B11/24
CPCG01B9/0201G01B11/2441
Inventor 王恺邓建郝俊杰徐冰孙小卫
Owner 孙小卫
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