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A kind of multi-code track grating ruler

A technology of grating ruler and multi-code track, which is applied in the direction of using optical devices, instruments, measuring devices, etc., can solve the problem of wasting the precision measurement ability of grating ruler, and achieve the effect of simple structure, reliability and low cost

Active Publication Date: 2022-02-25
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the accuracy of this grating scale depends on the accuracy of the reference point detection, and the detection accuracy of the reference point is generally much lower than the resolution of the incremental part of the grating scale, which wastes the precision measurement capability of the grating scale in a certain sense

Method used

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  • A kind of multi-code track grating ruler

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Embodiment Construction

[0024] The present invention will be further described below with reference to the accompanying drawings and in combination with preferred embodiments.

[0025] refer to figure 1 , a multi-code grating ruler, comprising a first grating code track G1, a second grating code track G2, a linear gradient filter code track A, two grating reading heads R1, R2 and a gradient film reading head R3, the The first grating code track G1, the second grating code track G2 and the linear gradient filter code track A are parallel to each other, and the two grating reading heads R1 and R2 correspond to the first grating code track G1 and the second grating code track G2, the gradient film reading head R3 is set corresponding to the linear gradient filter code track A, the first grating code track G1, the second grating code track G2 and the linear gradient filter code track A are arranged to move horizontally along the length direction, and the two grating reading heads R1, R2 and the gradient...

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Abstract

A multi-code grating ruler, measuring equipment and data processing method, the grating ruler includes a first grating code track, a second grating code track, a linear gradient filter code track, two grating reading heads and a gradient film reading head, The three code tracks are parallel to each other, the two grating reading heads are set corresponding to the first and second grating code tracks, the gradient film reading head is set corresponding to the linear gradient filter code track, and the three code tracks are set along the length The direction moves horizontally, the two grating reading heads and the gradient film reading head remain fixed, and respectively use the laser with a wavelength of λ to detect the first grating code track, the second grating code track and the linear gradient filter code track, wherein the grating The reading head obtains the displacement-interference phase information of the grating ruler, and the gradient film reading head obtains the displacement-reflected light intensity information of the gradient film. The invention greatly reduces the system complexity and cost of the absolute grating ruler while ensuring the measurement accuracy and range.

Description

technical field [0001] The invention relates to the field of grating ruler measurement, in particular to a multi-code track grating ruler. Background technique [0002] The grating ruler is an important measurement tool in precision measurement and precision machining. As a key component of the grating ruler, the grating plays the role of a reference scale in the measurement. The absolute grating ruler does not need to move to zero in a large range before measurement, and can provide real-time absolute displacement information during the measurement process, and the cumulative error is very small, which is the development trend of grating ruler technology. [0003] In the existing technical solutions, the absolute grating ruler is generally a grating type with reference points, and the measurement of absolute displacement is realized by detecting several discrete reference points within the range. Strictly speaking, the grating ruler of this principle is a "quasi-absolute" ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 倪凯李星辉肖翔周倩王欢欢曾理江袁伟涵苏晓王晓浩
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV