Large-area high-resolution wide-field online measurement device and measurement method thereof

Abstract

The invention discloses a large-area high-resolution wide-field online measurement device and a measurement method for nanostructure films. Light emitted by a light source is converted into a single-wavelength light beam through a wavelength selector, and the single-wavelength light beam is converted into an elliptic polarized beam which is then projected to a to-be-measured nanostructure film. A film reflection beam passes through an imaging unit and a polarization state analysis unit to enter an area array detector to obtain imaging spectrum ellipsometry measurement data of the to-be-measured nanostructure film. The data are matched with theoretical values and extracted to obtain parameter values of the to-be-measured nanostructure film at corresponding pixels, and the extracted parameter values form three-dimensional micrograph morphology of the to-be-measured nanostructure film. The problem that an existing device is small in focal depth value of an instrument and difficult to realize wide-field clear imaging and high-transverse-resolution measurement at the same time is solved, and large-area high-resolution accurate measurement of the nanostructure film is truly realized.

Description

technical field [0001] The invention belongs to the field of nano-manufacturing, especially the field of online process monitoring and optimization control of large-area nano-structured films in large-scale nano-manufacturing and flexible electronic manufacturing, and specifically relates to a large-area high-resolution nanostructured film (including vertical resolution and lateral resolution) resolution) wide field of view on-line measuring device and measuring method thereof. Background technique [0002] Nano-manufacturing refers to the manufacturing technology in which the characteristic size of the product is on the order of nanometers, that is, the manufacturing technology in which the characteristic size is within 100nm. In order to reduce the cost of nano-manufacturing, in recent years, in emerging industries such as flexible electronics, solar photovoltaics, and flat panel displays, roll-to-roll (roll-to-roll) or sheet-to-sheet (sheet-to-sheet) and other large-scale...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the measurement requirements in large-scale nano-manufacturing and the defects of existing measurement technologies, the present invention provides a large-area, high-resolution, wide-field on-line measurement device and measurement method for the geometric parameters of nanostructured films to solve the problems of existing devices and instruments. The depth of focus is very small, and it is difficult for the device to realize wide-field clear imaging and high lateral resolution measurement at the same time, so as to truly realize large-area high-resolution accurate measurement of nanostructured films

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