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Movable lens adjustment mechanism

A lens adjustment and lens technology, which is applied in installation, optics, instruments, etc., can solve problems such as poor stability, and achieve the effect of improving mode and stability

Active Publication Date: 2017-03-29
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

However, the flexible hinge disclosed in CN102707404A adopts a three-link mechanism, which has poor stability.

Method used

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Embodiment Construction

[0018] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0019] In the exposure equipment, the lens is adjusted in the XY direction to realize the aberration compensation of the system. figure 1 It is a structural schematic diagram of the movable lens adjustment mechanism of the present invention, figure 2 is a cross-sectional view of the drive structure. Such as figure 1 with 2 As shown, the movable lens adjustment mechanism includes a lens 100 and a lens barrel 200 , and the lens barrel 200 is divided into three parts: an inner ring 210 , a hinge mechanism 220 and an outer ring 230 . The lens 100 is fixed on the inner ring 210, and the outer ring 230 is the installation basis of the whole mechanism. The inner ring 210 of the lens barrel is connected with the outer ring 230 through three evenly distributed flexible hinge mechanisms 220 . The driving motor 500 is installed on the outer ring 23...

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Abstract

The invention discloses a movable lens adjustment mechanism comprising a lens (100) and a lens cone (200). The movable lens adjustment mechanism is characterized in that the lens cone (200) is composed of an inner ring (210), flexible hinge mechanisms (220) and an outer ring (230); the lens (100) is fixed on the inner ring (210); and the inner ring (210) is connected with the outer ring (230) through the three uniformly-distributed flexible hinge mechanisms (220). Compared with the prior art, a five-connecting-rod symmetrical structure is used so that the modality of the movable lens adjustment mechanism and the stability of the movable mechanism are improved.

Description

technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, in particular to a movable mirror adjustment mechanism. Background technique [0002] In the lithography projection objective lens, due to the manufacturing and assembly errors of the lens, the imaging quality of the objective lens deteriorates. In order to solve this problem, movable lenses are generally used to compensate for the manufacturing and assembly errors of the lens. [0003] The movable lens disclosed in Chinese patent CN102707404A is supported by three evenly distributed flexible hinges, and the X / Y / Rz direction movement of the movable lens is realized through the combined movement of the three flexible hinges. However, the flexible hinge disclosed in CN102707404A adopts a three-link mechanism, which has poor stability. Contents of the invention [0004] The object of the present invention is to propose a movable lens adjustment mechanism, which makes the ...

Claims

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Application Information

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IPC IPC(8): G02B7/02G03F7/20
Inventor 彭云平刘云飞
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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