Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Tracking and Sweeping Algorithm for Dresser Motor in Chemical Mechanical Planarization

A technology of chemical mechanics and scanning algorithm, which is applied in the field of tracking and scanning algorithm, can solve problems such as poor smoothness, cumulative error of trimmer operating cycle time, poor fitting degree of preset operating curve, etc., to achieve smoothness improvement and improved fitting degree of effect

Active Publication Date: 2019-09-24
BEIJING SEMICORE PRECISION MICROELECTRONICS EQUIP CO LTD
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0016] The purpose of the present invention is to solve the technical problems of current trimmers, such as cumulative errors in operating cycle time, poor smoothness, and poor fitting with preset operating curves

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Tracking and Sweeping Algorithm for Dresser Motor in Chemical Mechanical Planarization
  • Tracking and Sweeping Algorithm for Dresser Motor in Chemical Mechanical Planarization
  • Tracking and Sweeping Algorithm for Dresser Motor in Chemical Mechanical Planarization

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0057] The starting point is 3.5 inches, the ending point is 5 inches, the frequency is 10 Hz, and the displacement interval Zone is 10 (the preset threshold value). Now when the standard sin curve is selected, the default curve ( figure 1 ), the fitting curve of the prior art scheme ( figure 2 ) and the present invention ( image 3 ) for comparison.

[0058] image 3 The motor operates according to the algorithm provided by the present invention, and a time period is equally divided into 20 sections. Taking the motor operating parameters in the first subsection as an example, the time of each subsection of the motor operation is set to 150ms:

[0059] (1) The starting point of the first segment is 0, the cubic curve of the first segment is A[0]=0.149, B[0]=0.306, C[0]=0, D[0]=3.5,

[0060] Therefore, the initial displacement Y[0] and the final displacement Y[1] of the first subsection are respectively:

[0061] Y[0]=3.5mm

[0062] Y[1]=A[0]×(0.15-0) 3 +B[0]×(0.15-0) ...

Embodiment 2

[0070] The starting point is 3.5 inches, the ending point is 5 inches, the frequency is 10 Hz, the displacement interval Zone is 10 (the preset threshold), and the time interval ratio of the fifth displacement interval is changed to 5, and the preset curve ( Figure 4 ), the fitting curve of the prior art scheme ( Figure 5 ) and the fitting curve of the present invention ( Figure 6 )Compare.

[0071] Figure 6 The motor operates according to the algorithm provided by the present invention, and a time cycle is divided into 20 segments. Taking the motor operating parameters in the first small segment as an example, the time for each segment of the motor to run is set to 150ms

[0072] (1) The starting point of the sixth segment is 0, the cubic curve of the sixth segment A[6]=-1.280, B[6]=0.960, C[6]=0.548, D[6]=3.65,

[0073] Therefore, the initial displacement Y[0] and the final displacement Y[1] of the first subsection are respectively:

[0074] Y[0]=A[6]×(0.75-0.489) 3...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a sweeping algorithm for a finisher motor in chemical mechanical planarization. One running cycle of the finisher motor is divided into n equal-length time intervals Tn. The displacement zone corresponding to each time interval Tn is Zn. The running track of the finisher motor is a preset curve represented by a time displacement function. The degree of fitting between the running track of the motor and the preset curve is improved. The actual running cycle of the motor is closer to the set cycle. The running smoothness is also improved. The deviation between the actual time proportion and the preset time proportion is controlled within 1%.

Description

technical field [0001] The invention relates to a tracking and scanning algorithm of a trimmer motor in chemical mechanical planarization. Background technique [0002] The polishing part of the chemical mechanical planarization equipment needs the dresser to swing to dress the polishing pad. The specific swing trajectory of the dresser needs to follow the time displacement curve set by the man-machine interface of the dresser motor tracking and scanning (sweep interface for short), while the mainstream tracking and sweeping (Sweep) algorithm gives priority to controlling the time ratio, allowing certain deviations in the swing interval. The fitting degree of the actual motor running trajectory and the preset trajectory of the Sweep interface is not considered. [0003] In the man-machine interface of the trimmer motor, it is necessary to set parameters such as the trimmer motor’s operating mode, starting point, ending point, operating frequency, and the number of displacem...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G05B13/02B24B53/017
Inventor 李嘉浪魏鹏张为强袁丁
Owner BEIJING SEMICORE PRECISION MICROELECTRONICS EQUIP CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com