Side leakage tool for corrugated pipe
A bellows and tooling technology, applied in the field of semiconductor thin film equipment, can solve problems such as unqualified leak rate, increase equipment leak detection time, component replacement and assembly time, etc., so as to reduce damage probability, improve leak detection efficiency and improve use efficiency Effect
Inactive Publication Date: 2017-05-10
PIOTECH CO LTD
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Problems solved by technology
In addition, before the corrugated pipe is installed in the equipment, if the sealing performance is not tested, the increase of uncertain factors may lead to unqualified leak rate and other phenomena, which will increase the time of equipment leak detection and the replacement and assembly time of parts
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[0011] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0012] Such as figure 1 Shown: bellows leak detection tooling, including upper flange cover plate with holes 1, studs 2, bellows 3, hex nut 4, bottom blind plate with holes 5 and sealing ring 6. The sealing ring 6 is installed in the flange sealing grooves at both ends of the bellows 3, the bottom blind plate 5 with holes corresponds to the flange hole position of the bellows, and the bottom blind plate 5 with holes and The upper flange cover plate 1 with hol...
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The invention discloses a side leakage tool for a corrugated pipe, and the tool comprises an upper flange cover plate (1) with a hole, a double-head stud (2), the corrugated pipe (3), a hexagon nut (4), a bottom blind plate (5) with a hole, and sealing rings (6). The sealing rings (6) are disposed in flange sealing grooves at two ends of the corrugated pipe (3), and the bottom blind plate (5) with a hole is corresponding to the position of a flange hole of the corrugated pipe (3). The bottom blind plate (5) with a hole, the upper flange cover plate (1) with a hole and the corrugated pipe (3) are enabled to be in fixed connection through the double-head stud (2). The interface of the upper flange cover plate (1) with a hole is connected with a leakage detector. The tool is reasonable in structure, can reduce the damage rate of parts and the detector, also reduces the potential safety hazards of operation, can carry out the leakage detection of the corrugated pipe (3), also can carry out the pressure-maintaining operation of the corrugated pipe (3), and improves the utilization efficiency.
Description
technical field [0001] The invention relates to a tool for detecting leakage, in particular to a tool for detecting leakage of a bellows, and belongs to the technical field of semiconductor thin film equipment. Background technique [0002] The bellows commonly used in semiconductor coating equipment are used to realize the lifting function of certain components, and at the same time realize the interchange between the atmosphere and the vacuum environment, so it is necessary to ensure that the sealing performance of the bellows meets the requirements of the equipment. In addition, before the bellows is installed in the equipment, if the sealing performance is not tested, uncertain factors may be added, and the leak rate may be unqualified, which will increase the leak detection time of the equipment and the replacement and assembly time of parts. Contents of the invention [0003] In order to solve the above problems, the present invention designs a corrugated pipe sealin...
Claims
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Inventor 马壮朱佳奇
Owner PIOTECH CO LTD