Unlock instant, AI-driven research and patent intelligence for your innovation.

Moving equipment

A technology of equipment and equipment pairs, applied in the direction of conveyors, conveyor objects, packaging items, etc., can solve the problems of manpower and time, increased equipment operating costs, and increased costs.

Active Publication Date: 2021-09-14
DAIFUKU CO LTD
View PDF11 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, if batteries are installed one by one to the storage containers used in large quantities in the equipment, the cost of constructing the equipment will increase, and the function of the battery will decrease due to the life of the time, so it will take manpower and time to replace the battery
resulting in higher equipment operating costs

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Moving equipment
  • Moving equipment
  • Moving equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0052] refer to Figure 1 to Figure 7 An example of embodiment of the conveyance facility which concerns on this invention is demonstrated.

[0053] (transportation equipment)

[0054] exist figure 1 In the conveying facility 10 schematically shown, flat articles such as glass substrates are conveyed in a state stored in the storage container 20 . A transport trolley 50 (stack lifting device) serving as a transport mechanism for transporting the container 20 moves along a transport path extending in the transport direction W within the transport facility 10 . On the side of the transfer direction Y that intersects the transfer direction W at right angles to the transfer path of the transfer cart 50 , racks 11 serving as storage units for storing storage containers 20 are arranged.

[0055] In addition, in the figure, in order to understand the positional relationship between each component easily, the storage container 20 and the components attached to it may be shown by t...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention provides a transfer device capable of maintaining high cleanliness by preventing foreign matter such as dust from flowing into a container for storing substrates, and capable of low-cost device construction without requiring highly flexible cables. A container electrode for non-contact power supply to an FFU (24) that blows air into a storage container (20) while the storage container (20) is being transferred between the transfer trolley (50) and the storage rack (13). No matter whether the disk (28) is separated from the electrode disk (58) of the transport trolley or the electrode disk (18) of the storage rack, the air supply is stopped. (24) The internal pressure in the storage container (20) is increased to prevent the inflow of external dust, thereby maintaining the cleanliness of the storage container (20).

Description

technical field [0001] The present invention relates to equipment for conveying article storage containers, and more particularly to conveyance equipment for conveying article storage containers requiring high cleanliness, such as glass substrates and semiconductor substrates. Background technique [0002] Materials such as glass substrates used in the manufacturing process of flat panel displays and semiconductor substrates (silicon wafers, etc.) When the substrate is processed, it is required to maintain high cleanliness of the substrate so that unwanted foreign matter such as dust does not adhere to the substrate. [0003] Therefore, when transporting these substrates in equipment such as a manufacturing factory, as described in Patent Document 1, a method may be adopted in which a rectangular storage container capable of accommodating a plurality of substrates in parallel in the vertical direction is used, and a rectangular storage container is used at both ends of the r...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677
CPCH01L21/67706B65G1/04B65G1/0407B66F9/07B66F9/075B65D85/38B65D85/48B65D88/745H01L21/6773H01L21/67742B65G2201/0235B65G2201/0297
Inventor 鸟本和宏柴田敬司
Owner DAIFUKU CO LTD