Method for performing aligning processing on non-spherical optical element by magneto-rheological polishing wheel
A magnetorheological polishing and optical element technology, applied in the field of optical element processing, can solve the problems of inclination and offset, the origin position cannot be determined, etc., and achieve the effect of short test time, low workpiece alignment cost, and clear physical concept.
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[0053] A magneto-rheological polishing removal function calibration and aspheric surface alignment method of the present invention, the object of this embodiment is a permanent magnet type magnetorheological polishing system (MRF360) with a diameter of 360mm developed, which is integrated into a 2.5 m on a gantry-type five-axis linkage CNC center with large-diameter aspheric surface processing capabilities.
[0054] As shown in Figure 4(a) and Figure 4(b), the typical removal function of wheel magnetorheology and the distribution of removal rate in different directions. It can be seen that the removal rate is axisymmetrically distributed in one direction and completely asymmetrical in the other direction.
[0055] The step a of the present invention is used to actually calibrate the origin of the removal function of the MRF360. Fix the cylinder, align the lowest point of the polishing wheel with the standard cylinder, lower the polishing wheel continuously, and move the posit...
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