A method for aligning aspherical optical elements with a magnetorheological polishing wheel
A magnetorheological polishing and optical element technology, applied in the field of optical element processing, can solve the problems of inclination and offset, the origin position cannot be determined, etc., and achieve the effect of short test time, low workpiece alignment cost, and clear physical concept.
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[0053] A magnetorheological polishing removal function calibration and aspheric alignment method of the present invention. The object of this embodiment is a permanent magnet type magnetorheological polishing system (MRF360) with a diameter of 360mm, which is integrated to a 2.5 m Longmen five-axis linkage CNC center with large-diameter aspheric surface processing capability.
[0054] As shown in Figure 4(a) and Figure 4(b), the typical removal function of wheel magnetorheology and the distribution of removal rate in different directions. It can be seen that the removal rate is distributed axisymmetrically in one direction, and the distribution in the other direction is completely asymmetrical.
[0055] The MRF360 is actually calibrated to remove the origin of the function using step a of the present invention. Fix the cylinder, the lowest point of the polishing wheel is aligned with the standard cylinder, the polishing wheel is continuously lowered, and the standard cylinder or t...
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