Double-faced reflector parallelism measuring device and measuring method thereof
A double-sided mirror and measuring device technology, applied in the field of optical detection, can solve the problems of non-contact measurement of two reflecting surfaces, high machining accuracy, long cycle, etc., and achieve the effects of convenient use, high measurement accuracy and simple operation
Inactive Publication Date: 2017-06-13
ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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The first type requires high processing precision, which leads to high processing difficulty, high cost, and long cycle, and is usually not used; the second type is more commonly used in the process of calibration and calibration
[0003] However, the second requirement also has certain limitations
For example, because the parallelism of parallel plates is usually measured by optical interferometry, that is, the parallel plates need to be measured under transmission conditions. When the parallel plates are coated with reflective film, it is impossible to use interferometry to measure the parallelism of the two reflective surfaces non-contact. Moreover, contact measurement cannot be used due to the coating
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[0017] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0018] It should be noted that all expressions using "first" and "second" in the embodiments of the invention are used to distinguish two entities with the same name but different parameters or parameters that are not the same. It can be seen that "first" and "second" are only For the convenience of expression, it should not be understood as a limitation on the embodiments of the invention, and the following embodiments will not describe them one by one.
[0019] see figure 1 , which is a schematic structural diagram of the self-collimation calibration of the auxiliary deflection optical path according to the embodiment of the present invention. As an embodiment of the present invention, the device for measuring the para...
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The invention discloses a double-sided reflecting mirror parallelism measuring device and a measuring method thereof, comprising an autocollimator, a first single-sided reflecting mirror and a second single-sided reflecting mirror, and the light emitted by the autocollimator passes through the The first single-sided reflector and the second single-sided reflector return the light to the autocollimator through the second single-sided reflector, and the first single-sided reflector and the second single-sided reflector make the autocollimator The exit optical axis of the collimator is parallel to the return optical axis. The present invention uses two single-sided plane reflectors to deflect the optical path to realize self-collimation of one side of the double-sided reflector, and then measures the misalignment angle value of the other side of the double-sided reflector through an autocollimator to determine the double-sided reflector. Parallelism error of the surface mirror. It can be seen that the present invention can measure the parallelism error of the double-sided reflector at any time according to the requirement, and the measured parallelism error includes the influence of the coating on the parallelism to eliminate the film layer error.
Description
technical field [0001] The invention relates to the technical field of optical detection, in particular to a non-contact double-sided mirror parallelism measuring device and a measuring method thereof. Background technique [0002] Double-sided mirrors are widely used in the process of optical path adjustment and zero calibration of autocollimators, theodolites, total stations and other instruments. Double-sided mirrors are usually made of parallel flat glass coated with reflective film on both sides. There are two requirements in the process of optical path adjustment and zero calibration of instruments that require high angular precision such as autocollimators. One is to require the plane parallelism of the double-sided mirror to be within 1″ of high precision, and the other is to require Know the parallelism error value of the double-sided mirror and perform error compensation in the subsequent steps. The first type requires high processing accuracy, which leads to high...
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CPCG01B11/26
Inventor 王国名劳达宝周维虎崔成君张滋黎董登峰袁江纪荣祎石俊凯王岩庆范百兴程智郭晓晓
Owner ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI