Piezoelectric testing device and method of multi-environment batch-off upper system
A system-on-chip and testing device technology, applied in environmental/reliability testing, measuring devices, measuring electronics, etc., can solve the problems of unsolved problems in sample characteristic testing, fixed size, single performance, etc., to solve the problem of sample characteristics The effect of testing problems, convenient device disassembly, and convenient transportation
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Embodiment 1
[0043] A piezoelectric testing device for a multi-environment on-chip system, the air pipe I14 is connected to the air pipe II15 and the air pipe III16, the air pipe II15 and the air pipe III16 are perpendicular to the air pipe I14, and the valve I3 is set between the air pipe II15 and the air pipe III16. The air pipe II15 and the air pipe III16 are inserted into the container bottle 2, and the bottom of the container bottle 2 is provided with an electric furnace RS1, and the air pipe I14 communicates with one side of the chamber 13, and the air pipe I14 is close to the position of the chamber 13 A valve II4 is set; the container bottle 2 is filled with water, and the diameter of the mouth of the container bottle 2 is greater than the distance between the trachea II15 and the trachea III16;
[0044] The other side of the chamber 13 communicates with the trachea IV17, and the trachea IV17 is provided with a valve III11 near the chamber 13, and the outer end of the trachea IV17 i...
Embodiment 2
[0047] In the piezoelectric test device of a multi-environment system-on-a-chip described in Embodiment 1, a circuit board is installed in the chamber 13, and the circuit board includes a power supply AC connector, and one end of the power supply AC is connected in parallel with a switch One end of S1, one end of switch S2, one end of switch S3, one end of switch S4, one end of switch S5 and one end of switch S6;
[0048] One end of the switch S1 is connected to one end of the electric resistance wire RT5,
[0049] One end of the switch S2 is connected to one end of the temperature sensor T,
[0050] One end of the switch S3 is connected to one end of the humidity sensor H,
[0051] One end of the switch S4 is connected to one end of the pressure sensor P,
[0052] One end of the switch S5 is connected to one end of the electric furnace RS1,
[0053] One end of the switch S6 is connected to one end of the mechanical pump,
[0054] The other end of the power supply AC is co...
Embodiment 3
[0056] A kind of testing method of the piezoelectric test device of system on chip under the multi-environment described in embodiment 1, comprises the following steps:
[0057] Step 1: Open the door 9, place the sample on the sample stage 6, and clamp the sample with the clamp 8;
[0058] Step 2: Close the door 9 after the sample is connected to the interior part of the terminal 7 through the wire;
[0059] Step 3: The outer part of the terminal 7 is connected with the electric measuring equipment;
[0060] Step 4: close the valve II4, open the valve III11, run the mechanical pump 12, extract the gas in the chamber 13, make the chamber 13 reach a vacuum level, close the valve III11, and keep the air pressure in the chamber 13 at a vacuum level;
[0061]Step 5: Keep the air pressure in the chamber 13 at the vacuum level, power on the resistance wire RT5 to adjust the temperature in the chamber 13; use external electrical measuring equipment to test the influence of different ...
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