Two-stage magnetostrictive galvanometer deflection drive mechanism

Abstract

The invention relates to a two-stage magnetostrictive oscillating mirror deflection driving mechanism, comprising a giant magnetostrictive actuator, a fixture, a linear motor mover and a linear motor stator, the linear motor stator is fixed at the bottom, and the linear motor mover is installed on a linear motor The upper part of the motor stator; the fixture is fixed above the linear motor mover; the giant magnetostrictive actuator is installed inside the fixture, and its bottom surface is in contact with the side of the fixture; a thimble is installed at the center of the giant magnetostrictive actuator, and is connected with The vibrating mirrors are in contact with each other; an iron stand is placed behind the linear motor, and the cantilever beam is installed on the iron stand clamp, and connected with the iron stand by bolts; the vibrating mirror and the cantilever beam are connected by a fixing clip.

Description

technical field [0001] The invention belongs to the field of material application and precision drive technology, and specifically relates to a two-stage magnetostrictive oscillating mirror deflection drive mechanism. Background technique [0002] With the continuous development of science and technology, deflection devices are widely used, such as beam deflection devices that can obtain high-speed and low-voltage excitation in national defense technology. Today's beam deflection devices are based on the electromechanical actuation of mirrors, ie by means of piezoelectric, galvanometer, electro-optic or acousto-optic devices. However, these devices have some disadvantages, such as slow speed, high voltage, large volume, short life, low deflection accuracy, and inability to function on connectors with complex structures. [0003] With the development of giant magnetostrictive materials, this new type of rare earth functional material that appeared in the 1970s is regarded as...

AI Technical Summary

Problems solved by technology

[0006] Aiming at the problems that the deflection of the vibrating mirror cannot be driven quickly and precisely in the process of manufacturing parts in the engineering fields such as precision machining and ultra-precision machining, resulting in large surface roughness and low forming precision of the formed parts, the present invention proposes a two-stage magnetic The deflection drive mechanism of the oscillating mirror makes full use of the excellent performance of the giant magnetostrictive material, combines the motor drive and the driving of the giant magnetostrictive material, realizes the precise deflection of the galvanometer, and finally completes the fast and precise driving process of the galvanometer

Images