A Design Method of Coating Double Correction Leaf

Abstract

The invention provides a design method for coating double correction blades. The design method includes the following steps that a coating machine is arranged and comprises a first evaporation source and a second evaporation source. The first correction blade is arranged over the first evaporation source, the second correction blade is arranged over the second evaporation source, and a base piece is arranged above the first correction blade and the second correction blade; the first evaporation source serves as the top point and the angle alpha serves as the top angle so that a first right triangle can be formed with the base piece, the second evaporation source serves as the top point and the angle beta serves as the top angle so that a second triangle can be formed with the base piece; and the first correction blade is located on the outer side of the beveled edge of the second right triangle, the second correction blade is located on the outer side of the beveled edge of the first right triangle, and during coating, the first correction blade and the second correction blade are in an opening state all the time. According to the design method, during coating, the positions of the two correction blades are fixedly arranged, the moving frequency of a correction blade air cylinder can be reduced, the service life of the correction blade air cylinder is prolonged, and meanwhile coating uniformity can be improved.

Description

technical field [0001] The invention relates to the field of thin film preparation, and specifically discloses a method for designing double correction leaves for coating. Background technique [0002] In the process of evaporation coating, the correction leaf adjusts the mold material distribution in the cavity by blocking a part of the evaporation angle of the evaporation source, thereby selectively changing the amount of mold material evaporated on the substrate, and the coating has a uniform film thickness. The leaf correction process is the process of determining the shading angle of the correction leaf to the evaporation source. [0003] In the prior art, the coating process often involves more than two kinds of mold materials. Therefore, there are multiple evaporation sources in the chamber of the coating machine, and each evaporation source corresponds to a correction leaf. When different evaporation sources are deposited, the correction leaf The corresponding lifti...

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Problems solved by technology

[0003] In the prior art, the coating process often involves more than two kinds of mold materials. Therefore, there are multiple evaporation sources in the chamber of the coating machine, and each evaporation source corresponds to a correction leaf. When different evaporation sources are deposited, the correction leaf The corresponding lifting switch will be carried out to ensure the uniformity of the coating thickness, but during the lifting process of the correction leaf, the frequent movement of the correction leaf will increase the use of the correction leaf cylinder, reduce the life of the correction leaf cylinder, and increase the processing cost

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