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A post-processing method to improve the mechanical properties of optical components based on laser shock waves

A shock wave and laser energy technology, applied in laser welding equipment, welding equipment, metal processing equipment, etc., can solve problems such as difficult control, poor repeatability, and different degrees of improvement, and achieve controllability, application range, and accuracy. Effect

Active Publication Date: 2018-05-29
曾欢
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Heat treatment is also annealing. Although it is mainly used to release the residual stress of the film and improve the surface shape, the repeatability is poor. The heat treatment process parameters required for different materials, different coating parameters, and different types of thin film components are different, and the degree of improvement is also different. , so there are problems such as difficult to control in practical applications

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] A post-processing method for improving the mechanical properties of optical elements based on laser shock waves, comprising the following steps:

[0032] (1) A 1064nm high-reflection film with a size of φ50×5mm is produced by electron beam evaporation, and the residual stress R of the sample is obtained by using a wavefront interferometer 0 , and measured the critical adhesion force A between the sample film and the substrate using a nano scratch instrument 0 , the film critical interfacial binding force B 0 and hardness H 0 ;

[0033] (2) Randomly select 10 laser energy steps F j (j=1, 2, ..., 10), each laser energy step corresponds to 20 test points, and the number of irradiation pulses N for each test point is set 1 , to detect the occurrence and growth of damage by aiming at the position where the pump laser irradiates the sample under test by the online monitoring system, so as to obtain the percentage of the number of damage points and the number of all test p...

Embodiment 2

[0048] A post-processing method for improving the mechanical properties of optical elements based on laser shock waves, comprising the following steps:

[0049] ⑴A 532nm anti-reflection coating with a size of φ30×3mm is produced by electron beam evaporation, and the residual stress R of the sample is obtained by wave surface interferometer 0 , and measured the critical adhesion force A between the sample film and the substrate using a nano scratch instrument 0 , the film critical interfacial binding force B 0 and hardness H 0 ; (2) Randomly select 10 laser energy steps F j (j=1, 2, ..., 10), each laser energy step corresponds to 20 test points, and the number of irradiation pulses N for each test point is set 1 , to detect the occurrence and growth of damage by aiming at the position where the pump laser irradiates the sample under test by the online monitoring system, so as to obtain the percentage of the number of damage points and the number of all test points, and the p...

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Abstract

The invention provides a post-treatment method for improving mechanical properties of film components based on laser shock wave. The method comprises the following steps: taking mechanical properties R0, A0, B0 and H0 and laser damage resistance F0 and G0 of a film component which is not subjected to laser impact wave post-treatment as reference, and respectively obtaining influence rules of E0, Em and delta E on mechanical properties Rs, As, Bs and Hs and laser damage resistance Fs and Gs of a sample subjected to laser impact wave post-treatment for S times; optimizing initial laser energy E0, energy increasing gradient delta E and maximum laser energy Em according to improvement conditions of the mechanical properties and the laser damage resistance, and stopping circulating when the mechanical properties and the laser damage resistance of the film component are no longer improved and meet the requirements of experimental samples, and completing post-treatment of the mechanical properties of the film component. Through the post-treatment method for improving mechanical properties of film components based on laser shock wave, the mechanical properties of high-power optical film components are improved; the problem of the lack of an effective method of controlling the mechanical properties such as adhesion, film layer binding force and residual stress and the like of the optical film components at present can be solved.

Description

technical field [0001] The invention belongs to the technical field of post-processing of optical thin-film elements, and in particular relates to a post-processing method for improving the mechanical properties of optical thin-film elements by using laser shock wave technology. Background technique [0002] The development of modern high-power laser technology, especially the development of large-aperture systems, puts forward more and more stringent requirements on the performance of optical thin-film components, requiring them to have high optical precision, high mechanical properties, high damage threshold and high-precision surface shape control , will directly affect the function realization of the large-aperture precision optical system and the stability of the long-term operation of the system. There are many factors that affect the performance of optical thin films, including the characteristics of the thin film itself, the preparation process of the thin film, and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/00B23K26/352
CPCB23K26/00B23K26/356
Inventor 刘文文曹宇张健朱德华
Owner 曾欢
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