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Fluid control valve and control method thereof

A technology of a fluid control valve and a control method, which is applied in the direction of flow control, control/regulation system, non-electric variable control, etc., and can solve problems such as inability to judge the valve body and fluid control valve clogging fault, so as to improve the convenience of use and eliminate Accuracy error, the effect of eliminating misunderstanding

Active Publication Date: 2020-05-26
HORIBA STEC CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Therefore, if the user confirms the position of the valve body only by the output of the position sensor, it is impossible to judge whether the valve body has actually passed the opening position.

Method used

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  • Fluid control valve and control method thereof
  • Fluid control valve and control method thereof
  • Fluid control valve and control method thereof

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Embodiment Construction

[0034] Hereinafter, one embodiment of a mass flow controller incorporating the fluid control valve of the present invention will be described with reference to the drawings.

[0035] The mass flow controller 100 of this embodiment is used, for example, in a semiconductor manufacturing process.

[0036] Specifically, as figure 1 As shown, the mass flow controller 100 includes: a main body 5 formed with a flow channel 51 through which fluids such as gases used for semiconductor processing flow through the flow channel 51; The flow rate of the fluid; the fluid control valve 3 controls the flow rate of the fluid flowing through the channel 51; and the control device 4 controls the valve opening of the fluid control valve 3 so that the measured flow output by the flow measurement mechanism 2 Close to the predetermined set flow rate. Each part will be described in detail below.

[0037] The main body 5 is formed in a block shape, and the flow channel 51 passes through the block....

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PUM

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Abstract

The invention provides a fluid control valve and a control method thereof, which are used to eliminate misunderstandings of users and improve convenience of use. The fluid control valve comprises: a valve seat (31); It can be set in a way of approaching or moving away; the driver (33) moves the valve body (32) in the direction of approaching or moving away; the position information detection part (7) detects the valve body (32) relative to the valve seat (31) The value corresponding to the relative position of the valve body (32); and the position output part (42), regardless of the position information obtained by the position information detection part (7) at the position of the valve body (32) at the start of opening, the position of the start of opening is taken as zero Location.

Description

technical field [0001] The present invention relates to a fluid control valve for controlling the flow rate and pressure of fluid and a control program for the fluid control valve. Background technique [0002] As shown in Patent Document 1, a conventional fluid control valve includes: a valve seat; a valve body provided so as to be able to approach or separate from the valve seat; and an actuator to move the valve body. The fluid control valve is used to control the opening between the valve seat and the valve body by the actuator so that the flow rate and pressure of the fluid become target values. [0003] As shown in Patent Document 2, among the fluid control valves, there is a fluid control valve having a position sensor that measures the position of the valve body relative to the valve seat. The fluid control valve performs position control using the position of the valve body obtained by the position sensor. Accordingly, the flow rate can be controlled without being...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16K31/02F16K37/00
CPCF16K31/02F16K37/0025F16K37/0041Y10T137/8242F16K31/007F16K37/0083F16K37/0091G05D7/0635F16K1/34G05D7/0617G01D3/022F16K1/12
Inventor 国田大地家城笃史
Owner HORIBA STEC CO LTD