Two-dimensional displacement measurement device and method
A measuring device and two-dimensional displacement technology, applied in the field of laser measurement, can solve problems such as low measurement accuracy, difficult application, and difficult to measure accurately
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Embodiment 1
[0055] Please also refer to figure 2 In the two-dimensional displacement measurement device 100 provided by one of the embodiments of the present invention, the light splitting and frequency shifting module 4 may include a light splitting unit and a frequency shifting unit, and the light splitting unit is used to split the laser light entering the light splitting and frequency shifting module 4 to form At least three laser beams; the frequency shifting unit is used to shift the frequency of the three laser beams, and the light splitting unit cooperates with the frequency shifting unit to form at least three beams of light I 1 , I 2 , I 3 For measurement, and three beams of light I 1 , I 2 , I 3 The frequency is different.
[0056] The beam splitting unit may include a second beam splitter 41, a first mirror 42, a third beam splitter 43, and a second mirror 44; the frequency shifting unit may include a first frequency shifter 45, a second frequency shifter 46, and a secon...
Embodiment 2
[0063] Please also refer to image 3 , the two-dimensional displacement measuring device in this embodiment is basically the same as that in Embodiment 1, the difference is that the optical frequency shifting module 4 in this embodiment is different from Embodiment 1. The light splitting and frequency shifting module 4 also includes a second beam splitter 41, a first reflector 42, a third beam splitter 43, a second reflector 44, a first frequency shifter 45, a second frequency shifter 46 and a third frequency shifter Device 47, the light splitting and frequency shifting module 4 splits the light beam entering the light splitting and frequency shifting module 4 and realizes differential frequency shifting to form three beams of light 1 1 , I 2 , I 3 For measurement, the three beams are frequency-shifted by three frequency shifters ω 1 , ω 2 and ω 3 . The optical path formed by the second beam splitter 41, the first mirror 42, the third beam splitter 43, the second mirror ...
Embodiment 3
[0068] Please also refer to Figure 4 , the two-dimensional displacement measuring device in this embodiment is basically the same as that in Embodiment 1, the difference is that the optical frequency shifting module 4 in this embodiment is different from Embodiment 1. The light splitting and frequency shifting module 4 also includes a second beam splitter 41, a first reflector 42, a third beam splitter 43, a second reflector 44, a first frequency shifter 45, a second frequency shifter 46 and a third frequency shifter Device 47, the light splitting and frequency shifting module 4 splits the light beam entering the light splitting and frequency shifting module 4 and realizes differential frequency shifting, so that the three beams of light I in the outgoing light 1 , I 2 , I 3 For measurement, the three beams are frequency-shifted by three frequency shifters ω 1 , ω 2 and ω 3 . The optical path formed by the second beam splitter 41, the first mirror 42, the third beam spl...
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