Method for discriminating microstructures of different plain laser master masks

Abstract

The invention relates to a method for discriminating the microstructures of different plain laser master masks. A multi-angle spectrophotometer is used to measure the chroma information and the spectrum information of the fixed positions of the different plain laser master masks. The method comprises the following steps: fixing the laser master masks, rotating a color measuring device by every 5 DEG in a range of [0 DEG, 45 DEG], and sequentially recording the chromatic values L* values at a detection angle of 45 DEG; selecting one of the plain laser master masks as a standard master mask, and aligning the positions with the maximum L* value of the plain laser master masks to be compared with the position with the maximum L* value of the standard master mask; acquiring the spectrum information of any position of the standard master mask and the plain laser master masks to be compared; and combining a grating equation, acquiring the shapes and the peak wavelengths of the spectrum energy distribution curves of different plain laser master masks, comparing the shapes and the peak wavelengths, and determining, discriminating and comparing the microstructures of the different plain laser master masks. The method has the characteristics of convenience in operation, simplicity and fastness.

Description

technical field [0001] The invention relates to a method for discriminating the microstructure of different plain-surface laser masters, which uses a multi-angle spectrophotometer to measure chromaticity information and spectral information at fixed positions on different plain-surface laser masters, and distinguishes and compares the microstructures of different plain-surface laser masters . Fix the position of the master, change the angle between the color measuring instrument and the master, and measure the chromaticity information at different relative angles at the same position on the laser master. The initial measurement position of different plain laser masters is corrected by colorimetric information. Combined with the grating equation, the spectral energy distribution curves of different plain laser masters are collected by color measuring instruments, and the shape and peak wavelength position of the spectral energy curves are compared to distinguish and compare th...

AI Technical Summary

Problems solved by technology

However, since the microstructure of the beam laser master is one-dimensional, and the grating structure of the plain laser master is x, y two-dimensional, the methods used to detect the microstructure of the two laser masters cannot be used universally.

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