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Baffle device for evaporation equipment and evaporation equipment

A baffle device and equipment technology, applied in lighting devices, vacuum evaporation coating, sputtering coating, etc., can solve the problem of affecting the uniformity of organic light-emitting layer film formation, affecting the display quality of organic light-emitting panels, and blocking the evaporation spray source and other issues, to achieve the effect of improving display quality, avoiding the influence of coating uniformity, and facilitating recycling and utilization

Active Publication Date: 2019-03-08
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, during the evaporation process, due to the repeated use of the baffle, the evaporation material on the baffle is easy to fall off as the evaporation time increases, and there is a risk of blocking the evaporation injection source, which affects the uniformity of the organic light-emitting layer. performance, which further affects the display quality of organic light-emitting panels

Method used

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  • Baffle device for evaporation equipment and evaporation equipment
  • Baffle device for evaporation equipment and evaporation equipment
  • Baffle device for evaporation equipment and evaporation equipment

Examples

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Embodiment Construction

[0040] The following describes in detail the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary, only used to explain the present invention, and should not be construed as a limitation of the present invention.

[0041]In describing the present invention, it should be understood that the terms "center", "longitudinal", "length", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential" are based on the drawings The orientation or positional relationship is only for the convenience of describing the present invention and simplifying the descriptio...

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Abstract

The invention discloses a baffle device used for evaporation equipment and the evaporation equipment. The baffle device includes: a baffle assembly, the baffle assembly includes a baffle, and the baffle is used to separate the evaporation spray source and the substrate when the substrate is switched in the evaporation equipment; at least one collecting device, the The collection device is arranged below the baffle plate assembly, and is used to collect the evaporation material falling from the baffle plate, and the collection device has guides for guiding the evaporation material sprayed from the evaporation spray source. The guide surface of the baffle. According to the baffle device of the present invention, it is possible to prevent the evaporation spray source from being blocked due to the evaporation material on the baffle falling into the surroundings of the evaporation injection source, thereby preventing the substrate from being blocked due to the evaporation spray source being blocked or partially blocked. The uniformity of the top layer is affected.

Description

technical field [0001] The present invention relates to the technical field of evaporation, in particular to a baffle device used for evaporation equipment and evaporation equipment. Background technique [0002] In the manufacturing process of the organic light-emitting panel, an organic light-emitting layer needs to be fabricated on the substrate, and vacuum evaporation is a widely adopted method. In the related art, when switching between different substrates during the evaporation process, in order to avoid deposition of the evaporation material on the cavity wall of the evaporation equipment, a baffle is usually used to separate the substrate from the evaporation spray source, and wait for the completion of the substrate switching. After that, the baffle plate is removed again, and the new substrate is continuously evaporated. However, during the evaporation process, due to the repeated use of the baffle, with the increase of the evaporation time, the evaporation mater...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24
CPCC23C14/24C23C14/54C23C14/246H05B33/10C23C14/542B01F23/232312
Inventor 周炟莫再隆马群
Owner BOE TECH GRP CO LTD
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