Evaporation source, evaporation device and evaporation method
An evaporation source and evaporation technology, which is applied in the field of evaporation device and evaporation, evaporation source, can solve the problems of decreasing evaporation rate, affecting evaporation effect, increasing internal diffusion space, etc.
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[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0031] An embodiment of the present invention provides an evaporation source, such as figure 1 As shown, it includes: an evaporation crucible 10; a movable table 20, which is arranged in the evaporation crucible 10, and the movable table 20 includes at least a bottom plate 21, which is used to place the evaporation material 30; The surface surrounds and forms an evaporation cavity X; the moving mechanism 40 is connected with the movable table 20 and can drive ...
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