Evaporation source, evaporation device and evaporation method

An evaporation source and evaporation technology, which is applied in the field of evaporation device and evaporation, evaporation source, can solve the problems of decreasing evaporation rate, affecting evaporation effect, increasing internal diffusion space, etc.

Active Publication Date: 2017-07-28
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The embodiment of the present invention provides an evaporation source, an evaporation device, and an evaporation method, which can solve the problem that the vaporization and evaporation of t

Method used

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  • Evaporation source, evaporation device and evaporation method
  • Evaporation source, evaporation device and evaporation method
  • Evaporation source, evaporation device and evaporation method

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Embodiment Construction

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0031] An embodiment of the present invention provides an evaporation source, such as figure 1 As shown, it includes: an evaporation crucible 10; a movable table 20, which is arranged in the evaporation crucible 10, and the movable table 20 includes at least a bottom plate 21, which is used to place the evaporation material 30; The surface surrounds and forms an evaporation cavity X; the moving mechanism 40 is connected with the movable table 20 and can drive ...

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Abstract

The embodiment of the invention provides an evaporation source, an evaporation device and an evaporation method, and relates to the field of vacuum evaporation coating. The problems that when evaporation materials are subjected to gasification evaporation in an existing evaporation crucible, due to the fact that the internal diffusion space is increased, the evaporation rate is decreased, and the evaporation effect is affected are solved. The evaporation source comprises an evaporation crucible, a moving table and a moving mechanism, wherein the moving table is arranged in the evaporation crucible and at least comprises a bottom plate, the bottom plate is used for containing the evaporation materials, an evaporation cavity is formed by the moving table, the side face of the evaporation crucible and the upper surface of the evaporation crucible in an encircling manner, the moving mechanism drives the moving table to move in the evaporation crucible in the direction of being perpendicular to the bottom plate, and the upper surface of the evaporation crucible is provided with an evaporation material outlet.

Description

technical field [0001] The invention relates to the field of vacuum evaporation coating, in particular to an evaporation source, an evaporation device and an evaporation method. Background technique [0002] Vacuum evaporation coating refers to the process of condensing or depositing the material to be filmed on the surface of a low-temperature workpiece or substrate after heating, evaporating or sublimating in a vacuum environment to form a coating. After the film-forming substance is heated and evaporated or sublimated inside the evaporation crucible, it rises and is sent out through the evaporation outlet above the evaporation crucible. After the film-forming substance leaves the evaporation crucible, the temperature gradually decreases, and the speed of evaporation movement also gradually decreases, and finally deposits and forms a film layer on the surface of the substrate to be evaporated. [0003] For an organic display device, such as an organic electroluminescent d...

Claims

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Application Information

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IPC IPC(8): C23C14/24
CPCC23C14/24C23C14/243
Inventor 孙力
Owner BOE TECH GRP CO LTD
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