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Object lens detection device based on point spread function measurement

A technology of point spread function and detection device, which is applied in the direction of testing optical properties, etc., to achieve the effect of wide range of applications and quantitative measurement and evaluation.

Inactive Publication Date: 2017-08-01
SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
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Problems solved by technology

The objective lens used in the super-resolution optical microscope system is a plan apochromatic objective lens with a large numerical aperture (NA1.45), which is an optical system close to the diffraction limit. For the measurement and evaluation of the imaging quality of this type of objective lens, the above methods still have great limitations

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  • Object lens detection device based on point spread function measurement

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Embodiment Construction

[0022] Please refer to figure 1 , an objective lens detection device 100 based on point spread function measurement provided by an embodiment of the present invention, including a laser 1, a variable monochromatic filter wheel 2, a beam expander 3, a beam splitter 4, an objective lens 5, a three-dimensional nano A translation stage 7, a lens 8, a detector 9 and a computer 10. in:

[0023] The laser 1 can emit broadband white laser light. Preferably, the laser 1 is a broadband supercontinuum laser.

[0024] The variable monochromatic filter wheel 2 can selectively transmit monochromatic light of different wavelengths. It can be understood that the wide-band supercontinuum laser 1 emits wide-band white laser light, and through the variable monochromatic filter wheel 2, several typical wavelengths of monochromatic light can be selected, such as wavelengths of 488nm and 592nm.

[0025] It can be understood that the present invention adopts a wide-band supercontinuum laser and ...

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Abstract

The invention provides an object lens detection device based on point spread function measurement. Direct three-dimensional imaging of a point spread function is performed by using the mode of scanning the focus of a measured object lens through gold nanoparticles. According to the object lens detection device, the problem of point spread function measurement of the large-numerical-aperture object lens can be solved so that quantitative measurement and assessment of the imaging quality of the large-numerical-aperture object lens can be realized.

Description

technical field [0001] The invention relates to the field of design and manufacture of microscopic detection instruments, in particular to an objective lens detection device and method based on point spread function measurement. Background technique [0002] The optical microscope objective lens is the core component of the optical microscope imaging system, and the imaging quality of the objective lens seriously affects the final imaging effect of the entire system. Imaging quality mainly refers to the consistency of the spatial distribution of intensity and chromaticity between the image and the object without considering the magnification. In the super-resolution microscopy system, a large numerical aperture microscopic objective lens is generally used, and the imaging resolution can reach 50nm, which puts forward stricter requirements on the quality of the microscopic objective lens. Therefore, how to accurately and quantitatively measure and evaluate the imaging qualit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
CPCG01M11/02
Inventor 唐玉国魏通达张运海
Owner SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
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