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Ultrasonic cleaner and substrate processing system

A technology for a substrate processing system and cleaning device, which is applied in the directions of cleaning flexible articles, cleaning methods and utensils, and cleaning methods using gas flow, etc., can solve problems such as affecting product quality, and achieve the effect of avoiding defects and reducing poor substrate treatment

Active Publication Date: 2017-08-08
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the surface of the substrate is not absolutely smooth but there are many very small gaps, after impurity particles (Particles) enter the gaps, it is difficult to blow them with the existing air blowing device that forms an air knife. The impurity particles are purged out, resulting in a large amount of impurity residues (Remain) on the surface of the substrate when the substrate is further processed, which affects product quality

Method used

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  • Ultrasonic cleaner and substrate processing system
  • Ultrasonic cleaner and substrate processing system
  • Ultrasonic cleaner and substrate processing system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0058] refer to Figure 4 As shown, since the opening or closing of the door 21 of the load lock chamber is performed by the air supply cylinder 23, the gas is usually discharged directly after the door 21 is opened and closed, and there is a problem of gas waste. Embodiment 1 of the present invention adds a recovery device at the tail end of the drive cylinder 22 according to this phenomenon, filters the gas exhausted in the cylinder through a filter (Filter) and then applies it to an ultrasonic cleaning device, thereby achieving the effect of recycling. The schematic diagram of gas recycling is shown in Figure 5, and the specific structure is as follows Figure 6 Shown: wherein, the gas supply cylinder 23 is also communicated with the blowing unit of the ultrasonic cleaning device 10, and is used to provide gas to the blowing unit, that is, the gas supply end 111 in the blowing unit 11 shares the gas supply cylinder 23 of the processing device 20; the above The processing d...

Embodiment 2

[0064]The original CDA (Clean Dry Air, clean and dry compressed air) air supply system of the production line can be used, and another pipeline can be connected to directly act on the above-mentioned ultrasonic cleaning device 10 set on the top of the door 21 of the load lock chamber .

[0065] The concrete operation process of ultrasonic cleaning device 10 and door 21 is as follows:

[0066] After the door 21 is issued an order to open, the ultrasonic cleaning starts to work;

[0067] In the process of conveying the glass substrate into the door 21 by the robot arm, the surface to be treated (usually the upper surface away from the robot arm) is continuously purged by the ultrasonic cleaning device 10, so as to achieve the cleaning effect. Effect.

Embodiment 3

[0069] The gas supply end 111 of the air blowing unit 11 in the ultrasonic cleaning device 10 is specifically a negative pressure device connected to the atmosphere, so as to supply air to the pressure chamber 110 .

[0070] That is, a negative pressure device is installed to directly communicate with the atmosphere, so as to provide gas to the ultrasonic cleaning device 10 . The concrete operation process of ultrasonic cleaning device 10 and door 21 is as follows:

[0071] After the door 21 is issued an order to open, the ultrasonic cleaning starts to work;

[0072] In the process of conveying the glass substrate into the door 21 by the robot arm, the surface to be treated (usually the upper surface away from the robot arm) is continuously purged by the ultrasonic cleaning device 10, so as to achieve the cleaning effect. Effect.

[0073] On the basis of the above, refer to image 3 As shown, the entrance 21 of the above-mentioned processing device 20 is also provided with ...

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Abstract

The invention provides an ultrasonic cleaner and a substrate processing system and relates to the technical field of display. The ultrasonic cleaner is high in substrate blowing cleaning efficiency. Besides, when the ultrasonic cleaner is specifically applied to the substrate processing system, the surface cleanness degree of a substrate entering a processing device, and it is avoided that after the surface the substrate is processed, a large number of impurity residues are generated on the surface of the substrate. The ultrasonic cleaner comprises an air blowing unit, an ultrasonic oscillation generator and an air exhaust unit, wherein the air blowing unit is used for spraying airflow to the surface of an object to be cleaned, the ultrasonic oscillation generator is used for enabling the air sprayed out from the air blowing unit to generate oscillation, and the air exhaust unit is used for collecting the impurities blown out from the surface of the object to be cleaned.

Description

technical field [0001] The invention relates to the field of display technology, in particular to an ultrasonic cleaning device and a substrate processing system. Background technique [0002] During the manufacturing process of display products, the surface of the substrate needs to be cleaned for further processing of the substrate. Because the surface of the substrate is not absolutely smooth but there are many very small gaps, after impurity particles (Particles) enter the gaps, it is difficult to blow them with the existing air blowing device that forms an air knife. The impurity particles are blown out, resulting in a large amount of impurity residue (Remain) on the surface of the substrate when the substrate is further processed subsequently, which affects product quality. Contents of the invention [0003] In view of this, in order to solve the problems of the prior art, an embodiment of the present invention provides an ultrasonic cleaning device and a substrate ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B11/04B08B5/02B08B5/04B08B13/00H01L21/67
CPCB08B5/02B08B5/04B08B11/04B08B13/00H01L21/67011
Inventor 郭淳刘建辉孟盼盼冯忠李鹏许道先周庆高钟亮董康旭刘祖宏侯智
Owner BOE TECH GRP CO LTD
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