Acoustic Resonators, Filters and Diplexers
An acoustic wave resonator, surface acoustic wave technology, applied in impedance networks, electrical components, etc., can solve the problem of large size of electrostatic capacitor electrodes
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no. 1 approach
[0031] Figure 1A is a plan view of the acoustic wave resonator 100 according to the first embodiment, Figure 1B yes Figure 1A An enlarged view of a part of Figure 1C is along Figure 1B The cross-sectional view taken along the line A-A in the center. Figure 1A and Figure 1B Illustration of the dielectric film 28 is omitted. Such as Figure 1A to Figure 1C As shown, the acoustic wave resonator 100 of the first embodiment includes an interdigital transducer (IDT) 12 and a reflector 14 on a piezoelectric substrate 10 . The piezoelectric substrate 10 is, for example, a lithium niobate substrate or a lithium tantalate substrate. The IDT 12 and the reflector 14 are formed of a metal film.
[0032] The IDT 12 includes a pair of comb electrodes 18 facing each other. Each of the pair of comb electrodes 18 includes a plurality of electrode fingers 20 and a bus bar electrode 22 to which the electrode fingers 20 are connected. The comb electrodes 18 face each other such that ...
no. 2 approach
[0067] Figure 18 is a plan view of the acoustic wave resonator 200 according to the second embodiment. Such as Figure 18 As shown, in the acoustic wave resonator 200 of the second embodiment, each of the pair of comb electrodes 18 includes a plurality of dummy electrode fingers 50, and the first ends of the plurality of dummy electrode fingers 50 are connected to the bus bar electrodes 22 , the second end of the plurality of dummy electrode fingers 50 faces the end of the other electrode finger 20 of the comb electrodes 18 . The area between each end of the electrode fingers 20 and the end of a corresponding one of the dummy electrode fingers 50 is a gap area 24 . The other configurations are the same as those of the first embodiment, so descriptions thereof are omitted.
[0068] As in the acoustic wave resonator 200 of the second embodiment, dummy electrode fingers 50 whose ends face the ends of the electrode fingers 20 may be provided.
no. 3 approach
[0070] Figure 19 is a plan view of a part of the acoustic wave resonator 300 according to the third embodiment in the overlapping region 26 . Such as Figure 19 As shown, in the acoustic wave resonator 300 of the third embodiment, the electrode finger 20 includes two first regions 32a and 32b. The second region 34 is disposed farther in the Y direction than the first regions 32a and 32b. A region between the first regions 32a and 32b is a third region 36 in which the speed of sound waves is a third speed different from the first speed and the second speed. The other configurations are the same as those of the first embodiment, so descriptions thereof are omitted.
[0071]In the third embodiment, each of the electrode fingers 20 includes first regions 32a and 32b arranged away from each other in the Y direction, and second regions 32a and 32b arranged to sandwich the first regions 32a and 32b in the Y direction. region 34, and a third region 36 disposed between the first r...
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