ate power supply test channel extension structure and its test application method

Abstract

The invention discloses an ATE (auto-test equipment) power test channel extension structure; an overcurrent protective circuit included in each power extension branch is used for detecting the magnitude of current of the corresponding power extension branch during test, and maintaining the connection between the power extension branch and a device under test when the current of a current extension branch is normal; the power extension branch and the device under test are disconnected when the current extension branch is under overcurrent, the current extension branch under overcurrent is prevented from pulling down output voltage of a corresponding power test channel and affecting the test of other power extension branches connected to the same power test channel. Each overcurrent protective circuit is also used for setting on-off state of the power extension branches during power-on startup. The invention also discloses a test application method of the ATE power test channel extension structure. The ATE power test channel extension structure has overcurrent isolation function, test overkill due to overcurrent when multiple branches share the power test channel can be prevented, and branch selector switches can also be saved.

Description

technical field [0001] The invention relates to the field of semiconductor integrated circuit manufacturing, in particular to an integrated circuit automatic testing machine (ATE, Auto Test Equipment) power supply test channel expansion structure; the invention also relates to a test application method of the ATE power supply test channel expansion structure. Background technique [0002] like figure 1 As shown, it is a structural diagram of the existing ATE power supply test channel expansion structure; the test power supply channel 102 (Power Supply, PS) of ATE is limited in quantity under a fixed configuration, figure 1 The dotted box 101 in the middle represents the total test power channel 102 configured in the ATE, including multiple, figure 1 2 test power channels 102 are shown in , in order to separate these two test power channels 102, in figure 1 The corresponding test power supply channels 102 are also denoted by PS1 and PS2 respectively in . [0003] In order ...

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Problems solved by technology

[0004] figure 1 The existing structure shown can easily expand the number of channels of the test power supply channel 102, but since a plurality of devices under test 104 directly share the resources of a test power supply channel 102, if one of the device under test 104 is caused by a fault during the test When the current of the power supply pin is too large, when the current exceeds the driving current capability of the test power supply channel 102, the set output voltage of the test power supply channel 102 will be lowered, thereby affecting the performance of other devices under test 104 sharing the test power supply channel 102. Normal test, resulting in abnormal test of other DUT 104

like figure 2 shown, is figure 1 The structure shown is a state diagram when an overcurrent occurs in a device under test 104, figure 2 DUT11 in the middle has a fault, which causes a large current in the corresponding power extension branch. In order to express it more vividly, figure 2 In the figure, "damage DUT" is used to indicate DUT11, and "victim DUT" is used to indicate other DUTs corresponding to PS1, namely DUT12 to DUT1n. In the power extension branch corresponding to DUT11, the arrow line indicates the large current. It can be seen that because DUT11 corresponds to There is a large current in the power extension branch of the power supply, which makes the output voltage of PS1 drop, and the output voltage of PS1 will drop the voltage of the power supply corresponding to DUT12 to DUT1n, that is, the voltage from P12 to P1n, which will affect the normal test of DUT12 to DUT1n. Caused test exceptions from DUT12 to DUT1n

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