ate power supply test channel extension structure and its test application method

Abstract

The invention discloses an ATE power supply test channel extension structure. The structure comprises a plurality of power supply test channels, each power supply test channel comprises a plurality of power supply extension branch circuits, each power supply extension branch circuit comprises a branch circuit selection switch and an overcurrent protection circuit, the overcurrent protection circuit is used for detecting the current of the corresponding power supply extension branch circuit, the connection of the power supply extension branch circuit and a detected device is maintained when the current of the current extension branch circuit is normal, the connection of the power supply extension branch circuit and the detected device is disconnected when the current extension branch circuit is overcurrent, and the condition that the overcurrent current extension branch circuit reduces the output voltage of the corresponding power supply test channel so that the tests of other power supply extension branch circuits of the same power supply test channel is influenced is avoided. The invention also discloses a test application method of the ATE power supply test channel extension structure. According to the ATE power supply test channel extension structure and the test application method thereof, the overcurrent isolation function is provided, and the test over-killing due to overcurrent during sharing of the power supply test channel by multiple branch circuits can be prevented.

Description

technical field [0001] The invention relates to the field of semiconductor integrated circuit manufacturing, in particular to an integrated circuit automatic testing machine (ATE, Auto Test Equipment) power supply test channel expansion structure; the invention also relates to a test application method of the ATE power supply test channel expansion structure. Background technique [0002] Such as figure 1 As shown, it is a structural diagram of the existing ATE power supply test channel expansion structure; the test power supply channel 102 (Power Supply, PS) of ATE is limited in quantity under a fixed configuration, figure 1 The dotted box 101 in the middle represents the total test power channel 102 configured in the ATE, including multiple, figure 1 2 test power channels 102 are shown in , in order to separate these two test power channels 102, in figure 1 The corresponding test power supply channels 102 are also denoted by PS1 and PS2 respectively in . [0003] In ord...

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Problems solved by technology

[0004] figure 1 The existing structure shown can easily expand the number of channels of the test power supply channel 102, but since a plurality of devices under test 104 directly share the resources of a test power supply channel 102, if one of the device under test 104 is caused by a fault during the test When the current of the power supply pin is too large, when the current exceeds the driving current capability of the test power supply channel 102, the set output voltage of the test power supply channel 102 will be lowered, thereby affecting the performance of other devices under test 104 sharing the test power supply channel 102. Normal test, resulting in abnormal test of other DUT 104

like figure 2 shown, is figure 1 The structure shown is a state diagram when an overcurrent occurs in a device under test 104, figure 2 DUT11 in the middle has a fault, which causes a large current in the corresponding power extension branch. In order to express it more vividly, figure 2 In the figure, "damage DUT" is used to indicate DUT11, and "victim DUT" is used to indicate other DUTs corresponding to PS1, namely DUT12 to DUT1n. In the power extension branch corresponding to DUT11, the arrow line indicates the large current. It can be seen that because DUT11 corresponds to There is a large current in the power extension branch of the power supply, which makes the output voltage of PS1 drop, and the output voltage of PS1 will drop the voltage of the power supply corresponding to DUT12 to DUT1n, that is, the voltage from P12 to P1n, which will affect the normal test of DUT12 to DUT1n. Caused test exceptions from DUT12 to DUT1n

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