A selective infrared radiator
An infrared radiator and selective technology, applied in the direction of semiconductor devices, electrical components, circuits, etc., can solve the problem of reducing the selective radiation characteristics of devices, and achieve the effect of improving photoelectric conversion efficiency
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[0021] figure 1 Shown is a schematic cross-sectional structure diagram of the selective infrared radiator provided by Embodiment 1 of the present invention. figure 2 Shown is the one-dimensional Si / Er with different periodic structures provided by Embodiment 1 of the present invention 2 o 3 Transmission spectra of photonic crystals. image 3 Shown is the infrared radiation spectrum at 800° C. of radiators with different film thicknesses provided by Embodiment 1 of the present invention.
[0022] like figure 1 As shown, the selective infrared radiator provided by the present invention includes a silicon base material 1, an erbium oxide thick film 2 deposited on the base material, and a one-dimensional Si / Er deposited on the erbium oxide thick film 2 o 3 Photonic crystal 3. One-dimensional Si / Er 2 o 3 The photonic crystal 3 is composed of alternately deposited silicon thin films 4 and erbium oxide thin films 5 , and each layer of silicon thin films 4 and one layer of er...
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