An organic electroluminescent device, a manufacturing method thereof and a vapor deposition device
An electroluminescence device and electroluminescence technology, which are applied in the manufacturing of organic semiconductor devices, electric solid state devices, semiconductor/solid state devices, etc. effect of life
Inactive Publication Date: 2017-09-01
BOE TECH GRP CO LTD +1
View PDF3 Cites 4 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0003] At present, the method of vacuum evaporation is used to prepare OLED devices. During the process of evaporation and deposition of organic functional layers, the evaporation chamber must have a high degree of vacuum and a clean environment. The difference in process conditions during the evaporation process will affect the performance of OLED devices. It is very different, and the life of OLED devices prepared by vacuum evaporation method is relatively low, which does not meet the needs of the market.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
preparation example Construction
[0037] see figure 1 , a method for preparing an organic electroluminescent device provided in an embodiment of the present invention, comprising the following steps:
[0038] S101, forming an anode layer (Anode) on the base substrate;
[0039] Wherein, the material of the anode layer may be, for example, ITO, IZO, AZO, FTO and the like.
[0040] S102. Vacuum-deposit the organic functional layer material to be evaporated on the base substrate on which the anode layer is formed, and during the process of evaporating the organic functional layer material to be evaporated, to form the anode The base substrate of the layer is subjected to heat treatment to form an organic functional layer;
[0041] Wherein, the organic functional layer material may be, for example, an organic small molecule material.
[0042] Heat treatment refers to heating the base substrate, so that the evaporated organic functional layer material is slowly cooled on the base substrate, thereby improving the ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
| Property | Measurement | Unit |
|---|---|---|
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
Login to View More
Abstract
The invention provides an organic electroluminescent device, a manufacturing method thereof and a vapor deposition device to prolong the usage life of OLEDs. The manufacturing method for the organic electroluminescent device comprises the steps of forming an anode layer on a substrate; carrying out vacuum vapor deposition on organic functional layer materials to be vapor-deposited on the substrate on which the anode layer is formed, and carrying out thermal treatment on the substrate on which the anode layer is formed in the process of carrying out vacuum vapor deposition on the organic functional layer materials to be vapor-deposited to form an organic function layer; and forming a cathode layer on the substrate on which an organic functional layer is formed.
Description
technical field [0001] The invention relates to the field of display technology, in particular to an organic electroluminescent device, a preparation method and evaporation equipment. Background technique [0002] Organic electroluminescent devices (OLEDs) have the advantages of self-luminescence, high luminous efficiency, low power consumption, fast response, wide viewing angle, high brightness, bright colors, thin and light, etc., and are considered to have broad application prospects in the lighting and display device market , has been highly valued by the international optoelectronic academic and industrial circles. [0003] At present, the method of vacuum evaporation is used to prepare OLED devices. During the process of evaporation and deposition of organic functional layers, the evaporation chamber must have a high degree of vacuum and a clean environment. The difference in process conditions during the evaporation process will affect the performance of OLED devices....
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56C23C14/24C23C14/12H10K99/00
CPCC23C14/12C23C14/24H10K71/164H10K71/40H10K59/35H10K2102/361C23C14/5806H10K71/00H10K50/11H10K50/15H10K50/16H10K50/17H10K50/18H10K50/171
Inventor 刘欣孔超
Owner BOE TECH GRP CO LTD