Manipulator system for black silicon texturing and cleaning machine
A black silicon texturing and washing machine technology, applied in the direction of program control manipulators, manipulators, manufacturing tools, etc., can solve the problems of complex hysteresis of the manipulator system, and achieve the effects of novel structure, high industrial value, and improved production efficiency
Inactive Publication Date: 2017-09-29
无锡琨圣智能装备股份有限公司
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Problems solved by technology
Moreover, when multiple flower baskets enter the station at the same time to synchronize the production of multi-flower baskets, the existing mechanical arm system is difficult to meet the above requirements due to the complexity and hysteresis
Method used
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Embodiment Construction
[0017] Below in conjunction with specific embodiment, content of the present invention is described in further detail:
[0018] Such as figure 1 As shown, this embodiment is a manipulator system applied to a black silicon texturing cleaning machine, which includes a traverse rail frame 1 and a lifting arm 2. The traverse rail frame 1 includes a number of unit plates 3 arranged horizontally, and the height of several unit plates 3 is the same And adjacent distances are equal, and a pair of horizontal long rails 4 are fixedly connected to the upper and lower ends. The lifting arm 2 includes a cross arm 5, a lifting rod 6 and a traverse connection seat 7 connected sequentially from top to bottom. There is a pair of pendants 8 for hanging silicon wafer flower baskets.
[0019] combine figure 1 with figure 2 , the traversing connecting seat 7 is engaged with a pair of horizontal long rails 4 and fixed on one side of the traversing rail frame 1, the width of the traversing conne...
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The invention discloses a manipulator system for a black silicon texturing and cleaning machine. With the system, synchronous operation of multiple silicon wafer baskets in the texturing and cleaning process is realized, through cooperation with corresponding multiple stations, the production efficiency for silicon wafer texturing can be multiplied, a producer can change the number of lifting arms, settings of the corresponding stations and manipulator control procedures according to the yield requirement, and thus the proper production efficiency is selected; the structure is novel and efficient, transverse movement of a manipulator is realized through sliding rail connection, longitudinal lifting of the manipulator is realized through a rod-less cylinder, the baskets containing silicon wafers enter the corresponding stations one by one under the effect of the manipulator for corresponding procedures such as alkaline washing, acid washing, rinsing and the like, and the overhaul difficulty is small; reference movement of single mechanical arms and unit plates can be observed by the producer conveniently, the whole manipulator can be controlled by programmable logic controller (PLC) conveniently due to the flexible and simple structure, and thus the industrial value in the aspect of automatic production is relatively high.
Description
technical field [0001] The invention relates to the field of a manipulator system for a black silicon velvet washing machine, in particular to a manipulator system for a black silicon velvet washing machine. Background technique [0002] Texture cleaning machine is transported by transfer manipulator, and it is composed of a fully automatic continuous working cleaning device after damage removal, texturing, rinsing, neutralization and rinsing. It is mainly composed of main body, process tank, transfer manipulator, pipeline system, Electrical control system and other components. When the equipment is running, the flower baskets filled with silicon wafers are placed on the feeding table, and the flower baskets are sent to each processing station in turn by the transfer manipulator, and the silicon wafers are de-damaged, textured, etched, cleaned, and then the silicon wafers are sent by The manipulator moves to the discharge table, and the operator takes out the flower basket ...
Claims
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IPC IPC(8): B25J5/02B25J9/14B25J9/00
Inventor 邵玉林
Owner 无锡琨圣智能装备股份有限公司