Particle beam excited vacuum ultraviolet-visible band magnetic spectrometry method and system
A vacuum ultraviolet and spectral testing technology, applied in the measurement of color/spectral characteristics, polarization influence characteristics, etc., can solve the problems of limited time resources, large power loss, and difficult to hit etc.
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[0029] The present invention will be further described below in conjunction with drawings and embodiments.
[0030] The invention provides a magnetic spectrum test method in the vacuum ultraviolet-visible light band excited by particle beams, referring to figure 1 , including the following steps:
[0031] (1) In a vacuum environment, the excitation source 1 is used to generate proton beam ejection, the proton beam is neutralized by the ion beam neutralizer 3 to form a neutral energy-carrying atomic beam, and the energy-carrying atomic beam is transmitted to the sample stage 5 Placed on the surface of the sample, the atoms in the surface layer of the sample are excited, and the electron transitions of the atoms in the excited state generate the ultraviolet spectrum;
[0032] (2) Control the electromagnet 19 in the sample stage 5 so that the magnetic field produced is parallel or perpendicular to the propagation direction of the ultraviolet spectrum; the ultraviolet spectrum un...
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