Tubular perc single-sided solar cell and its preparation method and special equipment

A solar cell and tubular technology, which is applied in the field of solar cells, can solve the problems affecting the qualified rate of finished cells, the battery boat tooth marks and color difference, and affect the electrical performance of the battery, so as to solve the problem of scratches and wrapping, and reduce scratches The effect of high ratio and high yield
CN107256894BActive Publication Date: 2018-08-10GUANGDONG AIKO SOLAR ENERGY TECH CO LTD +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
GUANGDONG AIKO SOLAR ENERGY TECH CO LTD
Publication Date
2018-08-10

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Abstract

The invention discloses a tubular PERC single-sided solar cell, which comprises a back silver main grid, an all-aluminum back electric field, a back composite film, a P-type silicon, an N-type emitter, a front passivation film and a front silver electrode; The film includes one or more of aluminum oxide film, silicon dioxide film, silicon oxynitride film and silicon nitride film, and is deposited on the back of the silicon wafer by using tubular PECVD equipment. There are four gas pipelines for silane, ammonia, trimethylaluminum, and laughing gas. The device for loading and unloading silicon wafers of the tubular PECVD equipment is a graphite boat, and the depth of the stuck groove of the graphite boat is 0.5-1mm. The invention also discloses a preparation method and special equipment for a tubular PERC single-sided solar cell. By adopting the invention, the photoelectric conversion efficiency is high, the appearance yield rate and EL yield rate are high, and the problems of scratches and winding plating are solved.
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Description

technical field

[0001] The invention relates to the field of solar cells, in particular to a tubular PERC single-sided solar cell, a preparation method and special equipment for the tubular PERC single-sided solar cell. Background technique

[0002] Crystalline silicon solar cell is a device that effectively absorbs solar radiation energy and converts light energy into electrical energy by using the photovoltaic effect. Under the action, holes flow from the N region to the P region, electrons flow from the P region to the N region, and a current is formed after the circuit is turned on.

[0003] Traditional crystalline silicon solar cells basically only use front passivation technology, depositing a layer of silicon nitride on the front of the silicon wafer by PECVD to reduce the recombination rate of minority carriers on the front surface, which can greatly increase the open circuit voltage and short circuit of crystalline silicon solar cells current, thereby improving the...

Claims

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