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A three-axis capacitive accelerometer

An accelerometer and capacitive technology, applied in the direction of measuring acceleration, speed/acceleration/shock measurement, instruments, etc., can solve the problem of increasing axis cross-coupling, and achieve the effect of avoiding axis cross-coupling

Active Publication Date: 2022-06-24
SENODIA TECH (SHANGHAI) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But this method of capacitive accelerometer detection completely sharing a mass must increase the axis cross-coupling, especially when the sensitive mode of the mass in a certain axis is implemented in a rotational manner

Method used

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  • A three-axis capacitive accelerometer
  • A three-axis capacitive accelerometer
  • A three-axis capacitive accelerometer

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Embodiment Construction

[0049] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0050] In order to make the above objects, features and advantages of the present invention more clearly understood, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments.

[0051] refer to Figure 1-Figure 8 , figure 1 A top view of a three-axis capacitive accelerometer provided by an embodiment of the present invention, figure 2 for figure 1 The patt...

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Abstract

The invention discloses a three-axis capacitive accelerometer. The three-axis capacitive accelerometer comprises: a substrate, a movable part and a plurality of fixed electrodes; the surface of the substrate has a fixed anchor point; the movable part is arranged on the fixed anchor point; The movable part has a first mass, a second mass and a third mass; a plurality of fixed electrodes are divided into a first electrode group, a second electrode group and a third electrode group; the first electrode group is used for the second mass The block forms an X-axis detection capacitor to detect the acceleration input along the X-axis; the second electrode group is used to form a Y-axis detection capacitor with the first mass block to detect the acceleration input along the Y-axis; the third electrode group is used to interact with the first mass block. The three-mass form a Z-axis detection capacitor to detect acceleration input along the Z-axis. The technical solution of the present invention can realize the detection of accelerations in the X-axis, Y-axis and Z-axis directions in a rectangular three-dimensional coordinate system through three mass blocks, and by setting the motion dimension of the mass blocks, the problem of cross-axis coupling is avoided.

Description

technical field [0001] The present invention relates to a Micro-Electro-Mechanical System (Micro-Electro-Mechanical System for short MEMS), and more particularly, to a three-axis capacitive accelerometer. Background technique [0002] Micro-accelerometers fabricated by MEMS processing have been used more and more in a wide range of fields such as industry, medical, civil, and military because of their small size, low cost, good integration, and excellent performance. At present, in the application of various mobile terminals, cameras, gamepads, navigators and other products, to a certain extent, micro accelerometers have become standard configurations. In the development process, capacitive, resistive and piezoelectric are the main application mechanisms as the way to detect acceleration. Among them, capacitive accelerometers have become the most popular type of accelerometers because of their simple structure, low cost, and high sensitivity and linearity in the low frequen...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/125
CPCG01P15/125
Inventor 邹波郑青龙
Owner SENODIA TECH (SHANGHAI) CO LTD
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