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Lens adjustment device and adjustment method

A technology for adjusting devices and adjusting methods, applied in installation, instrumentation, optics, etc., can solve problems such as long cycle time, high risk, and troublesome disassembly and assembly, and achieve the effects of improving production efficiency, reducing assembly risk, and shortening the assembly and adjustment cycle

Active Publication Date: 2020-04-10
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The invention provides an adjustment device and adjustment method for lenses to solve the problems of high risk, troublesome disassembly and assembly and long cycle in the prior art

Method used

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  • Lens adjustment device and adjustment method
  • Lens adjustment device and adjustment method
  • Lens adjustment device and adjustment method

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Embodiment Construction

[0045] The present invention is described in detail below in conjunction with accompanying drawing:

[0046] like Figure 2-5c As shown, the present invention provides a lens adjustment device, comprising:

[0047] The first mirror base 1 is used to fix the first lens 2, and the upper surface of the first mirror base 1 is provided with an inclination angle, such as Figure 3a-3bAs shown, the inclination angle of the upper surface of the first mirror base 1 is β 1 . A first pressure ring 3 is provided between the first lens base 1 and the first lens 2 , and the first lens 2 is fixed on the first lens base 1 through the first pressure ring 3 .

[0048] The second lens holder 4 is used to fix the second lens 5. Preferably, a second pressure ring 6 is arranged between the second lens holder 4 and the second lens 5, and the second lens 5 is fixed by the second pressure ring 6 on the second lens. On the second mirror holder 4. The first mirror base 1 is arranged on the second m...

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Abstract

The invention discloses a lens adjusting device and an adjusting method. The adjusting device comprises a first mirror base, the upper surface of the first mirror base is provided with an inclination angle; a second mirror base, and the first mirror base is arranged on the second mirror base. Above: the tilt adjustment module is located between the second mirror base and the first mirror base, including at least one gasket with a through hole in the middle, the upper surface and the lower surface of the gasket are provided with an inclination angle, and the gasket is relative to the first mirror base Rotate along a circle; the air gap adjustment module includes several bosses arranged on the lower surface of the second mirror seat and several steps arranged on the upper surface of the tilt adjustment module and corresponding to the bosses, and the second mirror seat is relatively tilted to the adjustment module Rotation; the eccentric adjustment module is arranged on the first mirror base or the second mirror base, and drives the first mirror base or the second mirror base to move horizontally. The invention realizes the online adjustment of the mirror group, reduces the assembly risk caused by multiple disassembly and assembly of the mirror group, and improves the production efficiency.

Description

technical field [0001] The invention relates to the field of integrated circuit manufacturing equipment, in particular to a lens adjustment device and adjustment method. Background technique [0002] There are usually multiple lenses in the optical system. As the precision requirements of the optical system become higher and higher, the requirements for the relative position between the lenses are also higher and higher. Therefore, it is usually necessary to adjust the eccentricity, tilt Parameters such as lens and air gap are strictly limited. Generally, the eccentricity, inclination, and air gap between lenses cannot be guaranteed by direct installation, and need to be realized through adjustment. In addition, the optical system has higher and higher requirements for stability, so for optical lenses that do not need to move during work, they are usually fixed rigidly during installation, while parameters such as eccentricity, inclination, and air gap between lenses can onl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B7/02
CPCG02B7/02G02B7/026
Inventor 章富平
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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