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A graphite boat automatic loading and unloading equipment

A technology of automatic loading and unloading and graphite boat, which is applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., can solve the problems of high cost of six-axis robots and increase of production and manufacturing costs, so as to reduce labor costs and reduce production Loss, the effect of improving efficiency

Active Publication Date: 2019-01-11
深圳市大族光伏装备有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the prior art, a six-axis robot is generally used to insert the uncoated silicon wafer into the graphite boat, but the six-axis robot is expensive, which increases the cost of manufacturing

Method used

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  • A graphite boat automatic loading and unloading equipment
  • A graphite boat automatic loading and unloading equipment
  • A graphite boat automatic loading and unloading equipment

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Embodiment Construction

[0044] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0045]The idea, specific structure and technical effects of the present invention will be clearly and completely described below in conjunction with the embodiments and accompanying drawings, so as to fully understand the purpose, features and effects of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, rather than all of them. Based on the embodiments of the present invention, other embodiments obtained by those skilled in the art without creative efforts belong to The protection scope of the present invention. In addition, all the connection / connection relationships involved in the patent do not simply refer to the direct connection of components, but mean that a better connection structure can be formed by adding or reducing connection accessories according to specific implementati...

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Abstract

Disclosed is an automatic chip assembly and disassembly apparatus for a graphite boat (80), relating to the technical field of solar cell automation apparatuses. The apparatus comprises a silicon wafer loading and unloading mechanism (100) and a silicon wafer assembly and disassembly mechanism (200), wherein the silicon wafer loading and unloading mechanism (100) is located on one side of the silicon wafer assembly and disassembly mechanism (200); the silicon wafer loading and unloading mechanism (100) comprises a cassette conveying device (10), a cassette lifting device (20) and a silicon wafer conveying device (30); and the silicon wafer assembly and disassembly mechanism (200) comprises a cassette transfer device (50), an XY platform device (60), a wafer insert device (70) and a graphite boat (80). The beneficial effects are: meeting the automatic production requirements of cell manufacturers, reducing labour costs, reducing production losses, and improving the efficiency of silicon wafer coating.

Description

technical field [0001] The invention relates to the technical field of solar cell automation equipment, and more specifically, the invention relates to a graphite boat automatic loading and unloading sheet equipment. Background technique [0002] PECVD (Plasma Enhanced Chemical Vapor Deposition) plasma enhanced chemical vapor deposition uses low-temperature plasma as an energy source. The silicon wafer is placed on the cathode of glow discharge under low pressure, and the silicon wafer is heated by glow discharge (or an additional heating element). The chip is heated to a predetermined temperature, and then an appropriate amount of reaction gas is passed through. The gas undergoes a chemical and plasma reaction to form a solid film on the silicon chip. [0003] The graphite boat is used as the carrier electrode of the silicon chip, and the silicon chip must be placed on the graphite boat to carry out the coating process. In the manufacturing process of silicon solar cells, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/513C23C16/458
CPCC23C16/458C23C16/513
Inventor 王俊朝李军阳李学文刘兵吉
Owner 深圳市大族光伏装备有限公司
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