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A jig for a mask plate, a mask plate cleaning system and a method for cleaning the mask plate

A technology for mask plates and fixtures, applied in cleaning methods and tools, chemical instruments and methods, and cleaning flexible objects, etc., can solve problems such as poor cleaning effect of mask plates, improve display quality, reduce residues, and improve cleaning effects Improved effect

Active Publication Date: 2020-12-04
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Embodiments of the present invention provide a fixture for a mask, a mask cleaning system, and a method for cleaning a mask, so as to solve the problem that the existing cleaning system has a poor cleaning effect on the mask

Method used

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  • A jig for a mask plate, a mask plate cleaning system and a method for cleaning the mask plate
  • A jig for a mask plate, a mask plate cleaning system and a method for cleaning the mask plate
  • A jig for a mask plate, a mask plate cleaning system and a method for cleaning the mask plate

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Embodiment Construction

[0034] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0035] In describing the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", The orientations or positional relationships indicated by "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationship shown in the installation position of the embodiment, and are only for the convenience of describing the present invention and simplifying th...

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Abstract

The invention discloses a clamp for a mask, a mask cleaning system and a method for cleaning the mask, relates to the technical field of mask cleaning equipment and aims to solve the problem of poor mask cleaning effect of an existing mask cleaning system. The clamp for the mask comprises a hanging frame, a fixing frame and a first driving device, wherein the fixing frame is used for fixing the mask and is rotationally connected with the hanging frame, and the rotating central axis extends in the transverse direction of the fixing frame; the first driving device is fixed on the hanging frame, connected with the fixing frame and used for driving the fixing frame to rotate relative to the hanging frame. The invention can be used for cleaning the mask.

Description

technical field [0001] The invention relates to the technical field of mask cleaning equipment, in particular to a mask fixture, a mask cleaning system and a mask cleaning method. Background technique [0002] In the manufacturing process of the display device, a mask is often used, and the required pattern can be formed on the substrate through the shielding effect of the mask. For example, the mask is used in OLED (Organic Light-Emitting Diode organic light Diode) plays an important role in the production of display devices. At present, the main method of preparing the organic light-emitting layer (EL layer) of OLED devices is evaporation. Partial shielding, then, in the evaporation process, the organic light-emitting material will inevitably be evaporated on the mask plate, so the mask plate needs to be cleaned after a period of use to remove the mask plate. Otherwise, the organic light-emitting material will accumulate thicker and thicker on the mask plate, and it will ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F1/82B08B11/00B08B11/02
CPCB08B11/00B08B11/02G03F1/82
Inventor 潘晟恺熊腾青刘杰杨凯乔永康李如
Owner BOE TECH GRP CO LTD
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