Valve device for improving door opening and closing speed of coating transition chamber
A valve device, door opening and closing technology, applied in the valve device, valve operation/release device, valve details, etc., can solve the problems of the cylinder failing to detect the switch position, the cylinder pulling up and down slowly, and the slow extension of the glass waiting time, etc. , to shorten the intake time, improve the exhaust efficiency, and improve the efficiency of sputtering.
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Embodiment 1
[0041] Such as figure 1 As shown, the valve device includes a main valve body 1, an auxiliary valve body 2 connected to the main valve body 1, and a cup piston 3 located between the main valve body 1 and the auxiliary valve body 2. The main valve body 1 has an air inlet Port P and working port A, the auxiliary valve body 2 has an exhaust port R, and the cup piston 3 is provided with a main air inlet 4 that penetrates the working port A and the air inlet P. One side of the cup piston 3 is connected to the main A pre-tension spring 51 is connected between the valve body 1. The other side of the cup piston 3 can block the exhaust port R on the auxiliary valve body 2. The main valve body 1 has a step surface 52, and the cup piston 3 When moving downward, the stepped surface 52 can cover the main air inlet 4 on the cup piston 3 and connect the working port A with the air outlet R.
[0042] Intake: the airflow enters the working port A through the air inlet P and the main air inlet 4, ...
Embodiment 2
[0049] The content of this embodiment is basically the same as that of the first embodiment, the difference is:
[0050] Such as image 3 As shown, the outer surface of the soft sealing ring 32 is an inclined surface corresponding to the weakened groove 53, and the wall surface of the main valve body 1 that is sealed with the cup piston 3 is adapted to the outer side of the soft sealing ring 32; in the cup piston 3 move down, when exhausting, it can squeeze the soft sealing ring 32, thereby reducing the flow area of the main air inlet 4, increasing the sealing strength between the cup piston 3 and the main valve body 1, making the exhaust more Smooth and shorten the exhaust reaction time.
Embodiment 3
[0052] The content of this embodiment is basically the same as that of the first embodiment, the difference is:
[0053] Such as figure 2 As shown, the air inlet P is provided with a valve block 71 that can move up and down along the peripheral wall of the air inlet P. The valve block 71 is provided with a through hole 72. The two ends of the pretension spring 51 are respectively connected to the valve block 71 and the cup piston. 3. The main valve body 1 is provided with an annular air groove 73 that can communicate with the air inlet P, and an auxiliary air inlet 74 located in the main valve body 1 is opened between the air groove 73 and the working port A; the valve block 71 can The air groove 73 is closed; when the air is in the air, the valve block 71 can move up under the action of the air pressure to connect the air inlet P and the working port A, which can quickly air in when the air inlet pressure is large , Shorten the air intake time, improve the working efficiency of...
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