Valve device for improving door opening and closing speed of coating transition chamber

A valve device, door opening and closing technology, applied in the valve device, valve operation/release device, valve details, etc., can solve the problems of the cylinder failing to detect the switch position, the cylinder pulling up and down slowly, and the slow extension of the glass waiting time, etc. , to shorten the intake time, improve the exhaust efficiency, and improve the efficiency of sputtering.

Active Publication Date: 2018-01-19
XIANNING CSG ENERGY SAVING GLASS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] 1) The cylinder pulls up and down slowly, and the glass waits for a long time in the process of entering the vacuum step by step and leaving the vacuum chamber
[0005] 2) When the glass enters from the first level of vacuum state to the next level of vacuum state, it is necessary to wait for the door between the vacuum buffer chambers to be completely closed before proceeding to the next step. The slow movement of the cylinder prolongs the waiting time for the glass
[0006] 3) The slow pulling of the cylinder sometimes causes the cylinder to fail to reach the position of the detection switch, resulting in failure

Method used

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  • Valve device for improving door opening and closing speed of coating transition chamber
  • Valve device for improving door opening and closing speed of coating transition chamber
  • Valve device for improving door opening and closing speed of coating transition chamber

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] Such as figure 1 As shown, the valve device includes a main valve body 1, an auxiliary valve body 2 connected to the main valve body 1, and a cup piston 3 located between the main valve body 1 and the auxiliary valve body 2. The main valve body 1 has an air inlet Port P and working port A, the auxiliary valve body 2 has an exhaust port R, and the cup piston 3 is provided with a main air inlet 4 that penetrates the working port A and the air inlet P. One side of the cup piston 3 is connected to the main A pre-tension spring 51 is connected between the valve body 1. The other side of the cup piston 3 can block the exhaust port R on the auxiliary valve body 2. The main valve body 1 has a step surface 52, and the cup piston 3 When moving downward, the stepped surface 52 can cover the main air inlet 4 on the cup piston 3 and connect the working port A with the air outlet R.

[0042] Intake: the airflow enters the working port A through the air inlet P and the main air inlet 4, ...

Embodiment 2

[0049] The content of this embodiment is basically the same as that of the first embodiment, the difference is:

[0050] Such as image 3 As shown, the outer surface of the soft sealing ring 32 is an inclined surface corresponding to the weakened groove 53, and the wall surface of the main valve body 1 that is sealed with the cup piston 3 is adapted to the outer side of the soft sealing ring 32; in the cup piston 3 move down, when exhausting, it can squeeze the soft sealing ring 32, thereby reducing the flow area of ​​the main air inlet 4, increasing the sealing strength between the cup piston 3 and the main valve body 1, making the exhaust more Smooth and shorten the exhaust reaction time.

Embodiment 3

[0052] The content of this embodiment is basically the same as that of the first embodiment, the difference is:

[0053] Such as figure 2 As shown, the air inlet P is provided with a valve block 71 that can move up and down along the peripheral wall of the air inlet P. The valve block 71 is provided with a through hole 72. The two ends of the pretension spring 51 are respectively connected to the valve block 71 and the cup piston. 3. The main valve body 1 is provided with an annular air groove 73 that can communicate with the air inlet P, and an auxiliary air inlet 74 located in the main valve body 1 is opened between the air groove 73 and the working port A; the valve block 71 can The air groove 73 is closed; when the air is in the air, the valve block 71 can move up under the action of the air pressure to connect the air inlet P and the working port A, which can quickly air in when the air inlet pressure is large , Shorten the air intake time, improve the working efficiency of...

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PUM

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Abstract

The invention provides a valve device for improving the door opening and closing speed of a coating transition chamber, and belongs to the technical field of coating glass production. The valve devicesolves the technical problems of low coating efficiency of existing coating equipment and the like. The valve device for improving the door opening and closing speed of the coating transition chambercomprises a main valve body, an auxiliary valve body connected with the main valve body and a packing leather piston located between the main valve body and the auxiliary valve body, the main valve body is provided with an air inlet and a working opening, the auxiliary valve body is provided with an exhaust opening, and the packing leather piston is provided with a main air inlet hole penetratingthe working opening and the air inlet; and a pre-tightening spring is arranged between one side face of the packing leather piston and the main valve body, the exhaust opening in the auxiliary valvebody can be shielded by the other side face of the packing leather piston, the main valve body is provided with a step face, and the step face can shield the packing leather piston when the packing leather piston moves downwards to communicate the working opening and the exhaust opening. The valve device has the beneficial effects of being efficient in air inlet and exhaust, simple and reliable instructure and the like.

Description

Technical field [0001] The invention belongs to the technical field of production of coated glass, and relates to a valve device for improving the opening and closing speed of a coating transition chamber. Background technique [0002] Magnetron sputtering coating technology is one of the most important technologies in industrial coating production at present. Magnetron sputtering has the advantages of high speed, low temperature, and low damage. The deposition rate is fast, the temperature change of the substrate is small, and the damage to the film is small. And a series of advantages. It is widely used in the large-area architectural glass coating industry. With the continuous maturity of industry processing technology and the gradual deepening of market competition, cost reduction has become a trend. Due to the use of high-power power-consuming equipment, water and electricity costs are always a major production cost. This is especially true for the equipment use of glass co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K11/044F16K31/383
Inventor 江亮
Owner XIANNING CSG ENERGY SAVING GLASS
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