Ultra-high vacuum cryogenic sample stage

Abstract

The invention discloses an ultrahigh vacuum low-temperature sample table and belongs to the field of vacuum device instruments. The ultrahigh vacuum low-temperature sample table comprises a mechanicallift-pulling device, a low-temperature lengthened pipe, a sliding electrode, a connect-fixing cap, a sample table body and a detachable shielding cover, wherein the mechanical lift-pulling device isupward fixed to a low-temperature cooling head through screws, the mechanical lift-pulling device is downward fixed to the low-temperature lengthened pipe through screws, the low-temperature lengthened pipe is a hollow anaerobic copper pipe and is downward fixed to the sliding electrode through screws, the sliding electrode is fixed to the connect-fixing cap through screws, the connect-fixing capis movably connected with the sample table body below the connect-fixing cap, and the sample table body is fixed to the detachable shielding cover through screws. Mechanical, thermotical and electrical connection and dismounting of the sample table in vacuum can be achieved, meanwhile the sample plane of the sample table can rotate and change temperature, and sample measurement can be performed indifferent directions.

Description

technical field [0001] The patent of the present invention belongs to the field of vacuum equipment and instruments, and relates to a device for a vacuum sample stage, especially a device that can be easily installed or disassembled, and the plane of the sample stage can be rotated, and can be applied to the field of low-temperature ultra-high vacuum. Background technique [0002] At present, known ultra-high vacuum cryogenic sample stages are mainly made of oxygen-free copper. During the measurement process, the sample needs to be placed on the sample stage first, and then the sample stage is manually fixed in the measurement chamber, and then the air pressure, temperature and other conditions of the measurement chamber are adjusted. In such devices, the inclination angle of the sample stage plane cannot be changed after the sample stage is placed in the measurement chamber. In addition, the vacuum measurement chamber needs to be opened during the installation or removal o...

AI Technical Summary

Problems solved by technology

In such devices, the inclination of the sample stage plane cannot be changed after the sample stage is placed in the measurement chamber

In addition, the vacuum measurement chamber needs to be opened during the installation or removal of the sample stage, and the sample stage is placed in the measurement chamber from the outside, which will cause the sample to be exposed to the air for a short time, and the vacuum measurement chamber needs to readjust the measurement chamber Environment parameters in

This process will lead to changes in the properties of the sample, and it will take a lot of time to regain the ultra-low temperature and ultra-high vacuum environment required for measurement

Images