Closed scanning galvanometer device for laser machine
A scanning galvanometer and closed technology, which is applied in the field of closed scanning galvanometer devices, can solve the problems of unstable relative position and easy to be interfered by dust in the air, and achieve the effect of compact structure, small influence and precise optical path control
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[0038] This embodiment provides a kind of airtight scanning galvanometer device for laser machine, such as figure 1 -3, it should be noted that the "front" and "rear" in this embodiment both refer to the propagation of the laser light from front to back. The sealed scanning vibrating mirror device includes: base 1, X vibrating mirror mechanism 2, Y vibrating mirror mechanism 3, field mirror mechanism 4;
[0039] The X vibrating mirror mechanism 2 includes an X vibrating mirror motor 22, an X vibrating mirror lens 23 driven by the X vibrating mirror motor 22, and an X vibrating mirror seat 21. The X vibrating mirror seat 21 is provided with an X retainer for fixing the X vibrating mirror motor 22. Hole 24.
[0040] The X vibration lens 23 is fixedly connected to the output shaft of the X vibration mirror motor 22, and the X vibration mirror motor 22 drives the X vibration lens 23 to swing.
[0041] The Y vibrating mirror mechanism 3 includes a Y vibrating mirror motor 32, a Y...
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