Micro fluid control device

A fluid control device, a miniature technology, used in liquid variable volume machinery, pumps with flexible working elements, machines/engines, etc., which can solve problems such as increased noise, energy loss, and reduced contact interference.
CN107795465AActive Publication Date: 2018-03-13MICROJET TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
MICROJET TECH
Publication Date
2018-03-13

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Abstract

A micro fluid control device comprises a piezoelectric actuator and a shell. The piezoelectric actuator is provided with a suspension plate, an outer frame, a support and a piezoelectric ceramic plate. The suspension plate is in a square form and is provided with a first surface and a second surface, and the second surface is provided with a convex part. The outer frame is arranged outside the suspension plate in a surrounding mode and is also provided with a first surface and a second surface. The areas except the second surface of the outer frame and the convex part of the second surface ofthe suspension plate are all coplanar. The shell comprises a gas collection plate and a base. The gas collection plate is of a frame structure with a holding space. The base is formed by connecting agas inlet plate and a resonantor and is arranged in the holding space so as to close the piezoelectric actuator. A glue layer is arranged between the second surface of the outer frame of the piezoelectric actuator and the resonantor of the base, so that a needed depth of a compression cavity is maintained between the piezoelectric actuator and the resonantor.
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Description

technical field

[0001] The invention relates to a miniature fluid control device, in particular to a miniature, ultra-thin and silent micro fluid control device. Background technique

[0002] At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, micro pumps, sprayers, inkjet heads, industrial printing devices and other products contain fluid delivery structures. Its key technology, therefore, how to break through its technical bottleneck through innovative structure is an important content of development.

[0003] For example, in the pharmaceutical industry, many instruments or equipment that need to be driven by pneumatic power usually use traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, limited by the volume limitations of such traditional motors and gas valves, it is difficult to reduce the overal...

Claims

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