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Transport system and method for transporting processing components

A technology for components and moving parts is applied in the field of conveying systems and the use of the conveying system to convey processing components, which can solve the problems of ineffectively conveying masks and the like

Active Publication Date: 2021-07-30
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since existing methods and plant equipment are still unable to transport masks efficiently, a new mask transport system is still needed to complete the processing of semiconductor wafers with higher efficiency

Method used

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  • Transport system and method for transporting processing components
  • Transport system and method for transporting processing components
  • Transport system and method for transporting processing components

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Embodiment Construction

[0075] Hereinafter, several specific preferred embodiments will be listed and described in detail in conjunction with the accompanying drawings in the description, and several embodiments are shown on the drawings. However, the present invention may be embodied in many different forms and is not limited to the embodiments described below. The embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the claims of the present invention to those familiar with the art. this artist.

[0076] Also, for ease of description, spatially relative terms such as "below," "below," "lower," "above," "upper," etc. may be used herein to describe what is shown in the figures. The relationship of one element or part to another (or other) elements or parts. In addition to the orientation shown in the figures, spatially relative terms are intended to encompass different orientations of the device in use or operation. The device may be oth...

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Abstract

The present application provides a conveying system and a method for conveying a processing element. The conveying system is suitable for conveying a processing element, including: an acoustic wave emitting device configured to generate sound waves; and a carrying device configured to carry the processing element, Wherein when the processing element is arranged on the carrying device and the carrying device is set relative to the sound wave emitting device, the processing element moves relative to the carrying device through the sound waves generated by the sound wave emitting device.

Description

technical field [0001] The present invention relates to a conveying system and a method for conveying processing elements using the conveying system, and more particularly, to a conveying system for conveying processing elements for manufacturing semiconductor devices and a method for conveying the processing elements. Background technique [0002] Semiconductor devices are used in a variety of electronic applications, such as personal computers, mobile phones, digital cameras, and other electronic equipment. Semiconductor devices are usually fabricated by sequentially depositing insulating or dielectric layer materials, conductive layer materials, and semiconductor layer materials on a semiconductor substrate, and then patterning the resulting layers of various materials using a lithography process to form circuit components and parts. on the semiconductor substrate. Technological advances in the materials of integrated circuits and their design have resulted in the develo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677H01L21/683H01L21/687
CPCH01L21/677H01L21/67703H01L21/683H01L21/687
Inventor 李雨青林俊宏王育青郑博中陈桂顺
Owner TAIWAN SEMICON MFG CO LTD