Apparatus and method for producing a plasma, and use of such an apparatus
A plasma and equipment technology, applied in the field of plasma, can solve the problems of complex equipment construction, high energy and electric power input, etc., and achieve the effect of simple cost
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[0069] figure 1 A schematic diagram of a first embodiment of the apparatus 1 for generating plasma is shown. Here at figure 1 A) shows the device 1, which has a first electrode 3 and a second electrode 5. The first electrode 3 is formed as a rod-shaped or linear electrode, and the second electrode 5 is formed as a ring electrode, which surrounds the first electrode 3 and the second electrode 5 in the circumferential direction. One electrode 3. Here, the axial direction is perpendicular to figure 1 The image plane of a) extends, the radial direction is perpendicular to the axial direction, and is arranged in the image plane, and the circumferential direction extends concentrically around the axial direction. The first electrode 3 and the second electrode 5 are arranged spaced apart from each other.
[0070] In particular, the second electrode 5 is formed in a circular ring shape in this case, in which the first electrode 3 is arranged in the center of the circle defined by the...
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