Apparatus and method for producing a plasma, and use of such an apparatus
A plasma and equipment technology, applied in the field of plasma, can solve the problems of complex equipment construction, high energy and electric power input, etc., and achieve the effect of simple cost
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[0069] figure 1 A schematic diagram of a first embodiment of a device 1 for generating plasma is shown. here, in figure 1 In a) a device 1 is shown which has a first electrode 3 formed as a rod or wire electrode and a second electrode 5 formed as a ring electrode which surrounds the first electrode viewed in the circumferential direction. an electrode 3 . Here, the axial direction is perpendicular to figure 1 The image plane of a) extends, the radial direction is perpendicular to the axial direction and is arranged in the image plane, and wherein the circumferential direction extends concentrically around the axial direction. The first electrode 3 and the second electrode 5 are arranged at intervals from each other.
[0070] In particular, the second electrode 5 is formed in this case as a circular ring, wherein the first electrode 3 is arranged in the center of the circle defined by the second electrode 5 . The device 1 is shown schematically with a voltage source 7 conn...
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