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Efficient defect sampling method and system

A defect and high-efficiency technology, applied in the field of efficient defect sampling inspection, can solve problems such as uneven coverage of sampling inspection, achieve the effect of improving sampling inspection efficiency and realizing intelligent adjustment

Active Publication Date: 2018-04-10
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the problem of uneven sampling coverage of different production equipment in the same process section in the prior art, an efficient defect sampling method is now provided, which is applied in the field of integrated circuit manufacturing

Method used

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  • Efficient defect sampling method and system
  • Efficient defect sampling method and system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0078] Embodiment one, according to figure 2 As shown, an efficient defect sampling method, all products are generated according to the order of product batches entering the production line. Multiple inspection stations are set on the production line, and the inspection stations are set at intervals between multiple processes in the production line. There are multiple production equipments in the process;

[0079] An efficient defect sampling method includes the following steps:

[0080] Step S1: Determine the sampling batch according to the mantissa of the product batch number;

[0081] Step S2: Starting from the last inspected product batch, the inspection station counts all product batches passing through the inspection station separately according to the production equipment, and obtains the number of interval batches;

[0082] Step S3: After the detection station completes the last detection, compare the number of interval batches with the first preset value input by t...

Embodiment 2

[0106] Embodiment two, according to Figure 4 As shown, in step S6, the following steps are also included:

[0107] Step S61: Before the inspection station starts the next inspection, obtain the ratio of the product batch to be inspected from the completion of the previous process to the current time and the corresponding control time from the previous process to the next process, which is the first ratio , judging that the first ratio is compared with the second preset value input by the user;

[0108] If the first ratio is smaller than the second preset value, enter step S62;

[0109] If the first ratio is not less than the second preset value, the detection station gives up the detection and enters step S7;

[0110] In step S62, the detection station starts the next detection, and returns to step S2.

[0111] Specifically, in this embodiment, since there is a control time between processes, the product must enter the next process within the predetermined control time aft...

Embodiment 3

[0112] Embodiment three, according to Figure 5 As shown, in step S72, the following steps are also included:

[0113] Step S721: Before the inspection station starts the next inspection, obtain the ratio of the product batch to be inspected from the completion of the previous process to the current time and the corresponding control time from the previous process to the next process, which is the second ratio , judging that the second ratio is compared with the second preset value;

[0114] If the second ratio is smaller than the second preset value, enter step S722;

[0115] If the second ratio is not less than the second preset value, enter step S723;

[0116] In step S722, the detection station starts the next detection, and returns to step S2.

[0117] In step S723, the detection station gives up the detection and returns to step S71.

[0118] Specifically, in this embodiment, when the production equipment does not follow up with sampling batches, there is also the pr...

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Abstract

The invention discloses an efficient defect sampling method and system. The method is characterized by, under the premise of mantissa sampling, carrying out independent counting on product batches passing through a check station according to production equipment to control detected frequency of products of each production equipment; and carrying out intervention on the production equipment and thecheck station to reduce or increase sampling batches, thereby realizing intelligent adjusting, ensuring that all production equipment on a production line can be sampled uniformly, and improving sampling observation efficiency.

Description

technical field [0001] The invention relates to the field of integrated circuit manufacturing, in particular to an efficient defect sampling inspection method. Background technique [0002] With the intelligent development of industrial equipment, the integrated circuit industry has achieved rapid development. In the production process of large-scale integrated circuit wafers, the production factory needs to monitor the entire production process, detect defects in different processes in a timely manner, and provide timely feedback to production management personnel, so as to improve the production management personnel's ability to improve product defects and Adjust the efficiency of the process. [0003] The existing production sampling inspection method for large integrated circuit wafers usually uses the mantissa of the product batch number for sampling inspection. The simple mantissa sampling inspection can realize the coverage of the vertical process section, which is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
CPCH01L21/67242H01L21/67259H01L21/67271
Inventor 韩超龙吟倪棋梁王恺
Owner SHANGHAI HUALI MICROELECTRONICS CORP