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An efficient defect sampling method and system

A defect and high-efficiency technology, applied in the field of efficient defect sampling inspection, can solve problems such as uneven coverage of sampling inspection, achieve the effect of improving sampling inspection efficiency and realizing intelligent adjustment

Active Publication Date: 2020-02-14
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the problem of uneven sampling coverage of different production equipment in the same process section in the prior art, an efficient defect sampling method is now provided, which is applied in the field of integrated circuit manufacturing

Method used

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  • An efficient defect sampling method and system
  • An efficient defect sampling method and system
  • An efficient defect sampling method and system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0078] Example one, according to figure 2 As shown, an efficient defect spot inspection method. All products generate batch numbers of product batches in the order of entering the production line. There are multiple inspection stations on the production line. The inspection stations are arranged at intervals between the multiple processes of the production line. There are multiple production equipments in the process;

[0079] Efficient defect sampling method includes the following steps:

[0080] Step S1: Determine the sampling batch according to the mantissa of the product batch number;

[0081] Step S2: Starting from the last product batch tested, the testing station counts all product batches passing through the testing station separately according to the production equipment to obtain the number of interval batches;

[0082] Step S3: After the inspection station completes the last inspection, the interval batch number is compared with the first preset value input by the user;

[...

Embodiment 2

[0106] Example two, according to Figure 4 As shown, in step S6, the following steps are further included:

[0107] Step S61: Before the inspection station starts the next inspection, obtain the ratio of the product batch to be inspected from the completion of the previous process to the current time to the corresponding control time from the previous process to the next process, which is the first ratio , Judge the first ratio to be compared with the second preset value input by the user;

[0108] If the first ratio is less than the second preset value, go to step S62;

[0109] If the first ratio is not less than the second preset value, the detection station abandons the detection and proceeds to step S7;

[0110] In step S62, the inspection station starts the next inspection and returns to step S2.

[0111] Specifically, in this embodiment, since there is a control time between the process and the process, the product must enter the next process within the predetermined control time...

Embodiment 3

[0112] Example three, according to Figure 5 As shown, in step S72, the following steps are further included:

[0113] Step S721: Before the inspection station starts the next inspection, obtain the ratio of the product batch to be inspected from the completion of the previous process to the current time to the corresponding control time from the previous process to the next process, which is the second ratio , Judge the second ratio to compare with the second preset value;

[0114] If the second ratio is less than the second preset value, go to step S722;

[0115] If the second ratio is not less than the second preset value, go to step S723;

[0116] In step S722, the inspection station starts the next inspection and returns to step S2.

[0117] In step S723, the inspection station abandons the inspection and returns to step S71.

[0118] Specifically, in this embodiment, when there are no subsequent random inspection batches of the production equipment, there is also the problem of ma...

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Abstract

The invention discloses an efficient defect sampling method and system. The method is characterized by, under the premise of mantissa sampling, carrying out independent counting on product batches passing through a check station according to production equipment to control detected frequency of products of each production equipment; and carrying out intervention on the production equipment and thecheck station to reduce or increase sampling batches, thereby realizing intelligent adjusting, ensuring that all production equipment on a production line can be sampled uniformly, and improving sampling observation efficiency.

Description

Technical field [0001] The invention relates to the field of integrated circuit manufacturing, in particular to an efficient defect spot inspection method. Background technique [0002] With the intelligent development of industrial equipment, the integrated circuit industry has achieved rapid development. In the large-scale integrated circuit wafer production process, the production plant needs to monitor the entire production process, detect defects in different processes in a timely manner, and timely feedback to the production management personnel to improve the product defect improvement and improvement of the production management personnel. Adjust the efficiency of the process. [0003] The existing sampling inspection method for the production of large integrated circuit wafers usually uses the mantissa of the product batch number for sampling. The use of simple mantissa sampling can realize the coverage of the vertical process section, which is convenient for analyzing t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67
CPCH01L21/67242H01L21/67259H01L21/67271
Inventor 韩超龙吟倪棋梁王恺
Owner SHANGHAI HUALI MICROELECTRONICS CORP