Positive stress electromagnetic driven fast deflection mirror actuating mechanism and actuating method
A technology of electromagnetic drive and actuation mechanism, applied in optical components, instruments, optics, etc., can solve the problems of small frequency band, large driving force, low power consumption, etc., and achieve large frequency band, fast response speed, and large driving force. Effect
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[0017] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0018] like figure 1 As shown, a normal stress electromagnetically driven fast deflection mirror actuating mechanism of the present invention includes a mirror support structure 6, a base 7 and a universal flexible hinge support 16 connecting the mirror support structure 6 and the base 7, and also includes Between the support structure 6 and the base 7 are four normal stress electromagnetic actuators distributed symmetrically with respect to the universal flexible hinge support 16 and a capacitor fixed between the mirror support structure 6 and the base 7 for detecting the deflection angle of the mirror support structure 6 Type displacement sensor 5, the four normal stress electromagnetic actuators are respectively the first normal stress electromagnetic actuator 1, the second normal stress electromagnetic actuator 2, the third normal...
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