Evaporation source and evaporation equipment
An evaporation source and steam technology, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems of long distance and defects of the guide tube, and achieve the effect of preventing defects.
Inactive Publication Date: 2018-04-24
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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Problems solved by technology
[0006] The purpose of the present invention is to provide a kind of evaporation source, to solve the problem that the long distance of the draft tube in the prior art leads to bad
Method used
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[0028] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the implementation manners in the present invention, all other implementation manners obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present invention.
[0029] see figure 1 , is a structural schematic diagram of an evaporation device using the evaporation source in the embodiment of the present invention, including a vacuum pump 12 connected to the cavity 2, a reticle carrier 3, a substrate carrier 6, an evaporation source 100, an evaporation The source baffle 10, the main baffle 9, and the substrate carrying platform 6 also includes an alignment platform 8 that can adjust ...
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The invention provides an evaporation source. The evaporation source comprises a cavity and a spray nozzle, the cavity comprises a top and a bottom which are opposite to each other, and the spray nozzle is arranged on the top wall of the cavity; the spray nozzle is connected with a flow guide pipe, a fixing device is arranged on the side wall of the cavity, and the flow guide pipe is bent throughthe top of the cavity and fixed to the side wall surface of the cavity by the fixing device. The flow guide pipe is fixed to the side wall surface of the cavity by the fixing device, when the flow guide pipe leaves from the evaporation source and further passes through the area, with high temperature, of the side wall surface of the cavity, the descent speed of the temperature of the flow guide pipe is lowered, the temperature in the pipe is high, vapor micro-molecules for evaporation do not easily condense in the flow guide pipe, and a baseplate is prevented from being damaged. The inventionfurther provides evaporation equipment.
Description
technical field [0001] The invention belongs to the field of evaporation technology, in particular to an evaporation source and evaporation equipment Background technique [0002] Evaporation method is a vacuum coating technology of physical vapor deposition. It is to place the evaporation material in an evaporation source, and by heating the evaporation source, the material is converted from solid state to gaseous atoms, atomic groups or molecules, and then deposited on the film to be coated A thin film is formed on the surface of the substrate. [0003] OLED display technology is generally manufactured by vacuum thermal evaporation organic materials, by adding organic materials to the evaporation source, heating the organic materials or metal materials to the evaporation temperature in a vacuum environment, and evaporating or sublimating the materials onto the substrate to form a film. OLED display devices. [0004] The maximum substrate size corresponding to the existin...
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Login to View More IPC IPC(8): C23C14/24
CPCC23C14/24
Inventor 涂爱国李金川
Owner SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD