Device difference compensation method and apparatus for display substrate detection device, and detection device
A technology for testing equipment and display substrates, used in measuring devices, instruments, etc.
Active Publication Date: 2018-05-08
BOE TECH GRP CO LTD +1
View PDF8 Cites 1 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0005] For testing equipment, even different equipment of the same type have different sensitivities between the equipment, therefore, measurement differences are inevitable, and the measurement differences between different equipment can be called measuring machine differences. Experimental tests show that the measuring machine The difference can reach about 10um, which is far beyond the acceptable range of 2um, resulting in the accuracy and effectiveness of the measurement results of the detection of the pattern of the organic light-emitting unit. Therefore, there is a need for a method that can effectively improve the measurement results of the detection equipment. method of accuracy
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0046] The exemplary embodiments will be described in detail here, and examples thereof are shown in the accompanying drawings. When the following description refers to the accompanying drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The implementation manners described in the following exemplary embodiments do not represent all implementation manners consistent with the present invention. Rather, they are merely examples of devices and methods consistent with some aspects of the present invention as detailed in the appended claims.
[0047] The OLED display device includes a base substrate on which a pattern of organic light-emitting units arranged in a matrix is formed. After the pattern of the organic light-emitting unit is prepared on the base substrate, it is usually necessary to use special inspection equipment to analyze the formed organic light-emitting unit. The position of the pattern is detected, t...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention relates to a device difference compensation method and apparatus for a display substrate detection device, and a detection device. The compensation method includes the steps of acquiringbasic position deviation data, the basic position deviation data being generated by position detection of a pattern on a display substrate by a reference detection device; obtaining position deviation data of each time, the position deviation data of each time being generated by repeated position detection of the pattern formed on the display substrate using a to-be-adjusted detection device; andaccording to the basic position deviation data and position deviation data of each time, generating a position deviation reference compensation value to compensate the position deviation data generated by the to-be-adjusted detection device during the detection. The method can reduce the measurement device difference of the detection device, and effectively improve the accuracy and effectivenessof measurement results of the detection device.
Description
Technical field [0001] The present invention relates to the field of semiconductor technology, in particular to a method and device for machine error compensation of display substrate inspection equipment, and inspection equipment. Background technique [0002] The OLED (Active Matrix / Organic Light Emitting Diode) display device is a display device that actively emits light. The OLED display device includes a base substrate on which a pattern of organic light-emitting units arranged in a matrix is formed. At present, fine metals can be used. The mask is used to form the pattern of the organic light-emitting unit on the substrate by an evaporation method. [0003] After the pattern of the organic light-emitting unit is prepared on the base substrate, it is usually necessary to inspect the pattern, and after the inspection is qualified, the subsequent circuit board welding and other preparation steps are performed. [0004] At present, special detection equipment can be used to dete...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/04
CPCG01B21/045
Inventor 戚海平
Owner BOE TECH GRP CO LTD