Machine error compensation method and device for display substrate detection equipment, and detection equipment
A technology for detecting equipment and displaying substrates, applied to measuring devices, instruments, etc.
Active Publication Date: 2019-12-10
BOE TECH GRP CO LTD +1
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Problems solved by technology
[0005] For testing equipment, even different equipment of the same type have different sensitivities between the equipment, therefore, measurement differences are inevitable, and the measurement differences between different equipment can be called measuring machine differences. Experimental tests show that the measuring machine The difference can reach about 10um, which is far beyond the acceptable range of 2um, resulting in the accuracy and effectiveness of the measurement results of the detection of the pattern of the organic light-emitting unit. Therefore, there is a need for a method that can effectively improve the measurement results of the detection equipment. method of accuracy
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[0046] Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. The implementations described in the following exemplary examples do not represent all implementations consistent with the present invention. Rather, they are merely examples of apparatuses and methods consistent with aspects of the invention as recited in the appended claims.
[0047] The OLED display device includes a base substrate on which a pattern of organic light-emitting units arranged in a matrix is formed. After the pattern of the organic light-emitting unit is prepared on the base substrate, it is usually necessary to use special testing equipment to detect the formed organic light-emitting unit. The position detection of the pattern is carried out to detec...
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The invention relates to a device difference compensation method and apparatus for a display substrate detection device, and a detection device. The compensation method includes the steps of acquiringbasic position deviation data, the basic position deviation data being generated by position detection of a pattern on a display substrate by a reference detection device; obtaining position deviation data of each time, the position deviation data of each time being generated by repeated position detection of the pattern formed on the display substrate using a to-be-adjusted detection device; andaccording to the basic position deviation data and position deviation data of each time, generating a position deviation reference compensation value to compensate the position deviation data generated by the to-be-adjusted detection device during the detection. The method can reduce the measurement device difference of the detection device, and effectively improve the accuracy and effectivenessof measurement results of the detection device.
Description
technical field [0001] The invention relates to the technical field of semiconductors, in particular to a method and device for compensating machine error of display substrate testing equipment, and testing equipment. Background technique [0002] The OLED (Active Matrix / Organic Light Emitting Diode) display device is an active light-emitting display device. The OLED display device includes a substrate substrate, and a pattern of organic light-emitting units arranged in a matrix is formed on the substrate substrate. At present, fine metal The mask plate is used to form the pattern of the organic light-emitting unit on the substrate by evaporation. [0003] After the pattern of the organic light-emitting unit is prepared on the base substrate, it is usually necessary to inspect the pattern, and perform subsequent preparation steps such as soldering of the circuit board after passing the inspection. [0004] At present, special detection equipment can be used to detect the ...
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IPC IPC(8): G01B21/04
CPCG01B21/045
Inventor 戚海平
Owner BOE TECH GRP CO LTD