Method and device for acquiring parasitic mismatch capacitance of MEMS accelerometer

A technology of accelerometer and capacitance, which is applied in the direction of measuring acceleration, testing/calibration of speed/acceleration/shock measurement equipment, speed/acceleration/shock measurement, etc. It can solve the problem of low measurement accuracy and achieve high precision and reliable accuracy Effect

Active Publication Date: 2018-05-08
CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST
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Problems solved by technology

[0004] Based on the above analysis, it is necessary to provide a method for obtaining the parasitic mismatch capacitance of the MEMS accelerometer and a method for obtaining the parasitic mismatch capacitance of the MEMS accelerometer in view of the problem of low measurement accuracy in the traditional method of obtaining the parasitic mismatch capacitance. device

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  • Method and device for acquiring parasitic mismatch capacitance of MEMS accelerometer
  • Method and device for acquiring parasitic mismatch capacitance of MEMS accelerometer
  • Method and device for acquiring parasitic mismatch capacitance of MEMS accelerometer

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[0024] The specific embodiments of the method and device for obtaining parasitic mismatch capacitance of a MEMS accelerometer of the present invention will be described in detail below with reference to the accompanying drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention may be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

[0025] With the development of aerospace, intelligent applications and military systems, the demand for high-precision, high-stability and high-performance MEMS accelerometers has also increased; MEMS accelerometers have the following significant advantages over traditional accelerometers: Small size, light weight, low power consumption, easy integration, strong overload resistance and mass production. Among them, the capacitive MEMS accelerometer that ...

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Abstract

The invention discloses a method for acquiring the parasitic mismatch capacitance of an MEMS accelerometer, including the following steps: acquiring at least two preload voltages of an MEMS accelerometer during normal work and corresponding output voltages; acquiring fitting parameters according to the structure parameters, the preload voltages and the output voltages of the MEMS accelerometer; acquiring the bending amount of the mechanical beam of the MEMS accelerometer according to the structure parameters and the fitting parameters; and acquiring the parasitic mismatch capacitance of the MEMS accelerometer according to the structure parameters and the bending amount of the mechanical beam. The invention further discloses a device for acquiring the parasitic mismatch capacitance of an MEMS accelerometer. Through the process, the parasitic mismatch capacitance of the MEMS accelerometer during work is obtained. The problem that the traditional method for acquiring the parasitic mismatch capacitance has low measurement precision is solved. An effect of precise and reliable acquisition of the parasitic mismatch capacitance is achieved.

Description

technical field [0001] The invention relates to the technical field of accelerometer measurement, in particular to a method and a device for obtaining parasitic mismatch capacitance of a MEMS accelerometer. Background technique [0002] As a key sensitive element in inertial measurement and control systems, accelerometers have important applications in military, industrial, medical, security monitoring and consumer electronics, especially with the expansion of application fields and MEMS (Micro Electro Mechanical Systems) technology The development of MEMS accelerometers has become a research hotspot. Compared with traditional accelerometers, MEMS accelerometers have significant advantages: small size, light weight, low power consumption, easy integration, strong overload resistance and mass production. With the development of aerospace, intelligent applications and military systems, the demand for high-precision, high-stability and high-performance MEMS accelerometers is b...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P21/00G01P15/125
CPCG01P15/125G01P21/00
Inventor 董显山黄钦文朱军华恩云飞
Owner CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST
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