A kind of reduction furnace cold spraying method

Abstract

The invention discloses a reduction furnace cold spraying system and a spraying method. The reduction furnace cold spraying system comprises a gas workstation, a gas preheater, a gas heater, a powderfilling device, a spraying gun, a central control unit, an automatic mechanical arm, a reduction furnace clock cover bracket and a reduction furnace clock cover cleaning workstation; the reduction furnace clock cover bracket pushes a reduction furnace clock cover to perform a peripheral motion; the spraying gun performs a reciprocating linear motion and a reciprocating arc motion; and working carrier gas carries raw material powder to spray on the inner surface of the reduction furnace clock cover from the spraying gun to form a coating layer. The spraying system and method can realize high-speed spraying of the inner wall of a reduction furnace in an atmosphere; all monitoring and control operations are performed in the central control unit to realize full automation and intelligence of the inner wall spraying of the reduction furnace clock cover; through two-grade heating, the pollution of carrier gas and raw materials can be reduced to the greatest extent to guarantee original performances of the coating layer; and a low-pressure warehouse is used for storing the raw materials to solve the problems of easy oxidation and easy pollution of the raw materials.

Description

technical field [0001] The invention relates to the technical field of polysilicon production equipment, in particular to a reduction furnace cold spraying method. Background technique [0002] The improved Siemens method is the mainstream technology for the production of polysilicon in the world. Its core equipment is a reduction furnace. The mixed gas reacts to generate polysilicon and deposits it on the silicon core. The final product is polysilicon deposited on the silicon core, and the product is finally extracted from the reduction furnace in the form of polysilicon rods. [0003] In the polysilicon production process, electric heating is required to keep the temperature of the silicon rod at 1000°C-1200°C. The heat in the reduction furnace is transferred to the inner wall of the furnace in two ways. One is that the high-temperature silicon rod transfers its heat through radiation heat transfer. Transfer to the inner wall of the reduction furnace, one is that the heat...

AI Technical Summary

Problems solved by technology

Due to the high spraying temperature of thermal spraying, on the one hand, it will cause thermal stress inside the substrate and thermal deformation on the surface of the substrate; on the other hand, it will cause the coating to react with the ambient atmosphere and cause oxidation or performance degradation, reducing the performance of the coating.

In addition, the combination of the thermal sprayed coating and the substrate is mainly mechanical occlusion, the bonding strength of the coating is low, and the coating is easy to fall off and fail during use.

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