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Cleaning device and manufacturing device for flexible display

A technology for cleaning devices and manufacturing equipment, which is applied in cleaning methods and appliances, semiconductor/solid-state device manufacturing, and cleaning methods using liquids, etc., which can solve problems such as damaging device films and achieve the effect of avoiding damage

Inactive Publication Date: 2018-06-08
SHENZHEN ROYOLE TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the cleaning agent vapor generated during the cleaning process may damage the thin films of devices formed on flexible substrates, such as organic light-emitting diodes (OLEDs), etc.

Method used

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  • Cleaning device and manufacturing device for flexible display
  • Cleaning device and manufacturing device for flexible display
  • Cleaning device and manufacturing device for flexible display

Examples

Experimental program
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Embodiment Construction

[0023] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0024] In the description of the present invention, it should be understood that the terms "first" and "second" are used for description purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of said features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0025] In the descr...

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PUM

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Abstract

Provided is a cleaning device (10) for cleaning a device substrate (800). The cleaning device (10) comprises a receiving tank (11), a wet roller brush (12), a dry roller brush (13), and a driving device (14) disposed in the receiving tank (11). The receiving tank (11) is used to store the detergent. The wet roller brush (12) is for cleaning the lower surface of the substrate (820) with the detergent in the receiving tank (11). The dry roller brush (13) is used to clean the device film (840). The driving device (14) connects the wet roller brush (12) and the dry roller brush (13) for driving the wet roller brush (12) out of the receiving tank (11) and rotating to clean the lower surface of the substrate (820), and is used to drive the dry roller brush (13) to rotate to clean the device film(840).

Description

technical field [0001] The invention relates to the field of displays, in particular to a cleaning device and manufacturing equipment for flexible displays. Background technique [0002] In related technologies, a flexible substrate is generally fabricated on a device substrate during the manufacturing process of a flexible display, and a device film is formed on the flexible substrate, and finally the device substrate and the flexible substrate are peeled off by laser lift-off technology to form a flexible display. Laser lift-off technology uses laser light to penetrate from the device substrate to the flexible substrate, so the cleanliness of the device substrate will affect the success rate of the lift-off, so the device substrate needs to be cleaned. However, the cleaning agent vapor generated during the cleaning process may damage the thin films of devices formed on flexible substrates, such as organic light-emitting diodes (OLEDs). Contents of the invention [0003]...

Claims

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Application Information

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IPC IPC(8): B08B1/04B08B1/02B08B3/08H01L51/56
CPCB08B3/08B08B1/20B08B1/32B08B1/12
Inventor 周启豪叶昱均
Owner SHENZHEN ROYOLE TECH CO LTD