Method for detecting arrangement of ordered nano-tubular pores of porous film

Abstract

The invention discloses a method for detecting the arrangement of ordered nano-tubular pores of a porous film. The method comprises measuring a sample-beam current geometric Doppler broadening spectrum of a nanoporous film to be tested based on the Doppler broadening spectrum of a slow positron beam through rotating the nanoporous film to be tested around a beam axis by 90 degrees, acquiring Doppler broadening spectrums of the nanoporous film before and after rotation, respectively calculating linear S parameters or linear W parameters of the Doppler broadening spectrums acquired by the two processes and determining the order of the nanoporous film according to the change of the linear S parameters and linear W parameters acquired by the two processes. The method can detect surface information of the detected material and accurately detect the pore structure information of the film and the change of defects along with depth distribution. The substrate does not affect the detection of the porosity of the film, thereby eliminating the need for the film to be removed from the substrate. The method does not damage the nanopore structure of the film and guarantees the accuracy of the measurement results and the reusability of the sample.

Description

Technical field [0001] The present invention relates to the technical field of characterizing hole arrangement, in particular to a method for detecting ordered nanotube hole arrangement of porous film. Background technique [0002] The current techniques for characterizing hole arrangements mainly rely on electron microscopes, including scanning electron microscopes and transmission electron microscopes. The transmission electron microscope is a large-scale microanalysis device that uses high-energy electron beams as the illumination light source for magnification and imaging. The lens positions and light path diagrams of the transmission electron microscope and the optical microscope are basically the same. The light source is condensed by the condenser and illuminates the sample. The light beam passes through the sample and enters the objective lens. The objective lens converges and forms an image. In the second magnification by the objective lens, it enters the observer's eye...

AI Technical Summary

Problems solved by technology

In the process of stripping, the nanopore structure in the film is often more or less damaged, making the measurement results inaccurate

Images